公开(公告)号：US20170194125A1

公开(公告)日：2017-07-06

申请号：US14985847

申请日：2015-12-31

Applicant: Applied Materials Israel Ltd.

Inventor： Roman KRIS ,  Yakov WEINBERG ,  Yan IVANCHENKO ,  Ishai SCHWARZBAND ,  Dan LANGE ,  Arbel ENGLANDER ,  Efrat NOIFELD ,  Ran GOLDMAN ,  Ori SHOVAL

IPC: H01J37/22 ,  G01N23/225 ,  G01B15/04 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/6116 ,  G01N2223/646 ,  H01J37/28 ,  H01J2237/24592 ,  H01J2237/2813 ,  H01L22/12

Abstract: A Critical Dimensions Scanning Electron Microscope (CD-SEM) is described that comprises a unit for performing CD-SEM measurements of a semiconductor wafer, a BSE imaging unit for obtaining a Grey Level image (GL) of the wafer, and a unit for GL analysis and for processing the GL analysis results with reference to results of the CD-measurements.

公开(公告)号：US20160035076A1

公开(公告)日：2016-02-04

申请号：US14446295

申请日：2014-07-29

Applicant: Applied Materials Israel Ltd.

Inventor： Ishai SCHWARZBAND ,  Yan IVANCHENKO ,  Daniel RAVID ,  Orly ZVITIA ,  Idan KAIZERMAN

IPC: G06T7/00 ,  G06K9/62

CPC classification number: G06T7/001 ,  G06K9/4604 ,  G06K9/6211 ,  G06K2209/19 ,  G06K2209/403 ,  G06T2207/10028 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.

Abstract translation: 一种用于图像处理的方法包括提供在基板上制造的结构的微观图像和用于制造该结构的计算机辅助设计（CAD）数据。 显微镜图像由计算机处理，以便产生第一方向性图，其包括对于微观图像中的点的矩阵，对应于点处的边缘的大小和方向的各个方向性矢量，而不管幅度的符号 。 CAD数据由计算机处理，以便根据CAD数据产生模拟图像，并且基于模拟图像产生第二方向性图。 通过计算机比较第一和第二方向性图，以便将CAD数据注册到微观图像。