公开(公告)号：US20190096053A1

公开(公告)日：2019-03-28

申请号：US15719447

申请日：2017-09-28

Applicant: Applied Materials Israel Ltd.

Inventor： Assaf ASBAG ,  Ohad SHAUBI ,  Kirill SAVCHENKO ,  Shiran GAN-OR ,  Boaz COHEN ,  Zeev ZOHAR

IPC: G06T7/00 ,  G06K9/62 ,  G06K9/03

Abstract: There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.