公开(公告)号：US20190096053A1

公开(公告)日：2019-03-28

申请号：US15719447

申请日：2017-09-28

Applicant: Applied Materials Israel Ltd.

Inventor： Assaf ASBAG ,  Ohad SHAUBI ,  Kirill SAVCHENKO ,  Shiran GAN-OR ,  Boaz COHEN ,  Zeev ZOHAR

IPC: G06T7/00 ,  G06K9/62 ,  G06K9/03

Abstract: There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.

公开(公告)号：US20190293669A1

公开(公告)日：2019-09-26

申请号：US15933306

申请日：2018-03-22

Applicant: Applied Materials Israel Ltd.

Inventor： Kirill SAVCHENKO ,  Assaf ASBAG ,  Boaz COHEN

IPC: G01N35/00 ,  G06N99/00

Abstract: An examination system, a method of obtaining a training set for a classifier, and a non-transitory computer readable medium, the method comprising: upon receiving in a memory device object inspection results comprising data indicative of potential defects, each potential defect of the potential defects associated with a multiplicity of attribute values defining a location of the potential defect in an attribute space: sampling by the processor a first set of defects from the potential defects, wherein the defects within the first set are dispersed independently of a density of the potential defects in the attribute space; and obtaining by the processor a training defect sample set comprising the first set of defects and data or parameters representative of the density of the potential defects in the attribute space.

公开(公告)号：US20220222806A1

公开(公告)日：2022-07-14

申请号：US17605217

申请日：2020-03-24

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ohad SHAUBI ,  Boaz COHEN ,  Kirill SAVCHENKO ,  Ore SHTALRID

IPC: G06T7/00 ,  G06V10/764 ,  G06V10/774 ,  G06V10/776

Abstract: There is provided a method of automated defects' classification, and a system thereof. The method comprises obtaining data informative of a set of defects' physical attributes usable to distinguish between defects of different classes among the plurality of classes; training a first machine learning model to generate, for the given defect, a multi-label output vector informative of values of the physical attributes, thereby generating for the given defect a multi-label descriptor; and using the trained first machine learning model to generate multi-label descriptors of the defects in the specimen. The method can further comprise obtaining data informative of multi-label data sets, each data set being uniquely indicative of a respective class of the plurality of classes and comprising a unique set of values of the physical attributes; and classifying defects in the specimen by matching respectively generated multi-label descriptors of the defects to the multi-label data sets.