-
公开(公告)号:US20200295260A1
公开(公告)日:2020-09-17
申请号:US16850875
申请日:2020-04-16
Applicant: Arm Limited
Inventor: Xueming Huang , Ming He , Marinela Barci , Paul Raymond Besser , Saurabh Vinayak Suryavanshi , Lucian Shifren
IPC: H01L45/00
Abstract: Subject matter disclosed herein may relate to fabrication of a correlated electron material (CEM) device. Layers of a CEM to form a correlated electron switch (CES) device may be disposed between layers of electrode material. In an embodiment, one or more techniques may be employed to remove and/or neutralize parasitic features and/or devices introduced during manufacture of the CEM device.