专利检索 ap:("Arno Jan Bleeker" OR "Dominicus Jacobus Petrus Adrianus Franken" OR "Martinus Hendricus Hendricus Hoeks" OR "Lambertus Gerardus Maria Kessels" OR "Tobrjörn Sandström") AND inv:"Tobrjörn Sandström" 第 1 页

1.

发明授权
Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法

公开(公告)号：US07460208B2

公开(公告)日：2008-12-02

申请号：US11061754

申请日：2005-02-18

申请人： Arno Jan Bleeker , Dominicus Jacobus Petrus Adrianus Franken , Martinus Hendricus Hendricus Hoeks , Lambertus Gerardus Maria Kessels , Tobrjörn Sandström

发明人： Arno Jan Bleeker , Dominicus Jacobus Petrus Adrianus Franken , Martinus Hendricus Hendricus Hoeks , Lambertus Gerardus Maria Kessels , Tobrjörn Sandström

IPC分类号： G03B27/52 , G02B26/00

CPC分类号： G03F7/70291 , G03F7/70833 , G03F7/70875

摘要： A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.

摘要翻译： 一种光刻设备，其具有独立可控元件的阵列，其可拆卸地安装到光刻设备的支撑框架上的安装点。