公开(公告)号：US07533561B2

公开(公告)日：2009-05-19

申请号：US11506757

申请日：2006-08-18

申请人： Arthur Beyder ,  Frederick Sachs

发明人： Arthur Beyder ,  Frederick Sachs

IPC分类号： G01B5/28

CPC分类号： G01Q10/045 ,  G01Q60/38 ,  Y10T29/49 ,  Y10T29/49007 ,  Y10T74/10

摘要： A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.

摘要翻译： 用于原子力显微镜的诸如传感器的装置。 该装置包括第一振荡器，第二振荡器，互连第一振荡器和第二振荡器的一对第一同轴构件，用于扭转地悬挂第一振荡器，支撑结构和一对第二同轴构件，其轴线正交于 第一同轴构件的轴线，并且连接第二振荡器和支撑结构，用于扭转地悬挂第二振荡器。

公开(公告)号：US20070044545A1

公开(公告)日：2007-03-01

申请号：US11506970

申请日：2006-08-18

申请人： Arthur Beyder ,  Frederick Sachs

发明人： Arthur Beyder ,  Frederick Sachs

IPC分类号： G12B21/08 ,  G01R3/00 ,  G01B11/30 ,  H03B1/02

CPC分类号： G01Q10/045 ,  G01Q60/38 ,  Y10T29/49 ,  Y10T29/49007 ,  Y10T74/10

摘要： A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.

摘要翻译： 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器，用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法，该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层，在第一材料中形成支撑结构和振荡器，包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻，从而形成所述第二材料的所述至少一个柔性铰链。

公开(公告)号：US20080128385A1

公开(公告)日：2008-06-05

申请号：US12008127

申请日：2008-01-09

申请人： Arthur Beyder ,  Frederick Sachs

发明人： Arthur Beyder ,  Frederick Sachs

IPC分类号： B29D11/00

CPC分类号： G01Q10/045 ,  G01Q60/38 ,  Y10T29/49 ,  Y10T29/49007 ,  Y10T74/10

摘要： A method for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.

摘要翻译： 一种用于制造包括振荡器的装置的方法，该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层，在第一材料中形成支撑结构和振荡器，包括施加蚀刻剂，所述蚀刻剂对于 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻，从而形成所述第二材料的所述至少一个柔性铰链。

公开(公告)号：US07340944B2

公开(公告)日：2008-03-11

申请号：US11506970

申请日：2006-08-18

申请人： Arthur Beyder ,  Frederick Sachs

发明人： Arthur Beyder ,  Frederick Sachs

IPC分类号： G01B5/28

CPC分类号： G01Q10/045 ,  G01Q60/38 ,  Y10T29/49 ,  Y10T29/49007 ,  Y10T74/10

摘要： A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material.A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.

摘要翻译： 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器，用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法，该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层，在第一材料中形成支撑结构和振荡器，包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻，从而形成所述第二材料的所述至少一个柔性铰链。

公开(公告)号：US20070062265A1

公开(公告)日：2007-03-22

申请号：US11506757

申请日：2006-08-18

申请人： Arthur Beyder ,  Frederick Sachs

发明人： Arthur Beyder ,  Frederick Sachs

IPC分类号： G12B21/00 ,  G12B21/08

CPC分类号： G01Q10/045 ,  G01Q60/38 ,  Y10T29/49 ,  Y10T29/49007 ,  Y10T74/10

摘要： A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.

摘要翻译： 用于原子力显微镜的诸如传感器的装置。 该装置包括第一振荡器，第二振荡器，互连第一振荡器和第二振荡器的一对第一同轴构件，用于扭转地悬挂第一振荡器，支撑结构和一对第二同轴构件，其轴线正交于 第一同轴构件的轴线，并且连接第二振荡器和支撑结构，用于扭转地悬挂第二振荡器。