Ultrasonic Transducer and Method of Fabricating an Ultrasonic Transducer

    公开(公告)号:US20220013103A1

    公开(公告)日:2022-01-13

    申请号:US17478894

    申请日:2021-09-18

    摘要: An ultrasonic transducer that includes a delay line, an active piezoelectric element, and interposing metal conductive layer between the delay line and active piezoelectric element. The delay line and active piezoelectric element are joined so that ultrasonic waves may be coupled from the active piezoelectric element into the delay line or from the delay line into the active piezoelectric element. A via is formed, using a milling operation, in the active piezoelectric element to expose the edge of the interposing metal conductive layer between the delay line and active piezoelectric element. A conductive layer makes electrical contact between the interposing metal conductive layer and the surface of the active piezoelectric element to allow an electrical connection to be made from the surface of the active piezoelectric element to the interposing metal conductive layer.

    HIGH BANDWIDTH ULTRASONIC TRANSDUCER WITH METAL BACKING LAYER AND METHOD OF FABRICATION

    公开(公告)号:US20210283656A1

    公开(公告)日:2021-09-16

    申请号:US17196840

    申请日:2021-03-09

    IPC分类号: B06B1/06 H01L41/312

    摘要: An ultrasonic transducer includes a delay line substrate, a piezoelectric element, a metal conductive layer between the delay line substrate and the piezoelectric element, and a backing layer applied to the piezoelectric element. The delay line substrate and the piezoelectric element are acoustically joined, configured to couple ultrasonic waves from the piezoelectric element into the delay line substrate or from the delay line substrate into the piezoelectric element. The backing layer includes a metal film, the metal film has a thickness and an acoustic impedance, and the thickness and the acoustic impedance each have value sufficient to provide acoustic damping. The backing layer has a substantially columnar cross-sectional morphology with a substantially granular surface morphology.

    Ultrasonic Transducer and Method of Fabricating an Ultrasonic Transducer

    公开(公告)号:US20200175958A1

    公开(公告)日:2020-06-04

    申请号:US16204249

    申请日:2018-11-29

    摘要: An ultrasonic transducer that includes a delay line, an active piezoelectric element, and interposing metal conductive layer between the delay line and active piezoelectric element. The delay line and active piezoelectric element are joined so that ultrasonic waves may be coupled from the active piezoelectric element into the delay line or from the delay line into the active piezoelectric element. A via is formed, using a milling operation, in the active piezoelectric element to expose the edge of the interposing metal conductive layer between the delay line and active piezoelectric element. A conductive layer makes electrical contact between the interposing metal conductive layer and the surface of the active piezoelectric element to allow an electrical connection to be made from the surface of the active piezoelectric element to the interposing metal conductive layer.