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公开(公告)号：US07369703B2
公开(公告)日：2008-05-06
申请号：US11501843
申请日：2006-08-10
CPC分类号： G01N23/2251 , G01N21/95684 , G03F7/70616 , G06T7/0004 , G06T2207/30148 , H01J2237/2817
摘要： A system for measuring a pattern on a sample, including: a data processing system that processes a set of two-dimensional distribution data of intensities from the sample, to calculate: a set of edge points indicative of position of edges of the pattern in a two-dimensional plane from the two-dimensional distribution data; an approximation edge indicative of the edge of the pattern; an edge fluctuation data by calculating a difference between the set of edge points and the approximation edge; and a correlation between a first portion of the edge fluctuation data and a second portion of the edge fluctuation data.
摘要翻译： 一种用于测量样本上的图案的系统，包括：数据处理系统，处理来自样本的一组强度的二维分布数据，以计算：一组边缘点，其指示图案的边缘的位置 二维平面从二维分布数据; 指示图案的边缘的近似边缘; 通过计算边缘点集合和近似边缘之间的差异的边缘波动数据; 以及边缘波动数据的第一部分与边缘波动数据的第二部分之间的相关性。
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公开(公告)号：US20060269121A1
公开(公告)日：2006-11-30
申请号：US11501843
申请日：2006-08-10
IPC分类号： G06K9/00
CPC分类号： G01N23/2251 , G01N21/95684 , G03F7/70616 , G06T7/0004 , G06T2207/30148 , H01J2237/2817
摘要： A system for measuring a pattern on a sample, including: a data processing system that processes a set of two-dimensional distribution data of intensities from the sample, to calculate: a set of edge points indicative of position of edges of said pattern in a two-dimensional plane from said two-dimensional distribution data; an approximation edge indicative of the edge of the pattern; an edge roughness data by calculating a difference between the set of edge points and said approximation edge; and a correlation between a first portion of the edge roughness data and a second portion of the edge roughness data.
摘要翻译： 一种用于测量样本上的图案的系统，包括：数据处理系统，处理来自样本的一组强度的二维分布数据，以计算：一组指示所述图案的边缘位置的边缘点， 二维平面从所述二维分布数据; 指示图案的边缘的近似边缘; 通过计算所述一组边缘点和所述近似边缘之间的差异的边缘粗糙度数据; 以及边缘粗糙度数据的第一部分与边缘粗糙度数据的第二部分之间的相关性。
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公开(公告)号：US07095884B2
公开(公告)日：2006-08-22
申请号：US10071097
申请日：2002-02-11
IPC分类号： G06K9/00
CPC分类号： G01N23/2251 , G01N21/95684 , G03F7/70616 , G06T7/0004 , G06T2207/30148 , H01J2237/2817
摘要： The present invention provides a circuit pattern edge inspection method of finding out a failure in a fabricating process and image distortion in an observing apparatus by analyzing, by a non-destructive inspection, the shape of an edge of a line of a fine pattern in which characteristics of the material, process, and an exposure optical system in a semiconductor fabricating process appear, and performing analysis quantitatively. The method includes a step of detecting a set of edge points indicative of positions of edges of the pattern in a two-dimensional plane by a threshold method; a step of obtaining an approximation line for the set of edge points detected; and a step of obtaining an edge roughness shape and a characteristic by calculating the difference between the set of the edge points and the approximation line. A plurality of values are used as thresholds used for the threshold method.
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公开(公告)号：US07619751B2
公开(公告)日：2009-11-17
申请号：US12125444
申请日：2008-05-22
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。
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公开(公告)号：US20070242885A1
公开(公告)日：2007-10-18
申请号：US11808627
申请日：2007-06-12
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
IPC分类号： G06K9/48
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
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公开(公告)号：US07230723B2
公开(公告)日：2007-06-12
申请号：US11322559
申请日：2006-01-03
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。
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公开(公告)号：US20080226177A1
公开(公告)日：2008-09-18
申请号：US12125444
申请日：2008-05-22
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
IPC分类号： G06K9/48
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。
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公开(公告)号：US07405835B2
公开(公告)日：2008-07-29
申请号：US11808627
申请日：2007-06-12
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。
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公开(公告)号：US20060145076A1
公开(公告)日：2006-07-06
申请号：US11322559
申请日：2006-01-03
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Osamu Komuro , Hiroki Kawada
IPC分类号： G21K7/00
CPC分类号： G01N23/2251
摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
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10.发明申请SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD USING THE SAME 有权半导体检测装置和使用其的半导体检查方法公开(公告)号：US20120098954A1
公开(公告)日：2012-04-26
申请号：US13380526
申请日：2010-06-23
CPC分类号： H01J37/28 , G01B2210/56 , G02B21/002 , G02B21/361 , G02B21/365 , G02B21/367 , G06T5/50 , G06T7/0004 , G06T7/0006 , G06T7/0008 , G06T7/001 , G06T2207/10016 , G06T2207/10056 , G06T2207/10061 , G06T2207/20081 , G06T2207/30141 , G06T2207/30148 , H01J37/244 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Provided are a semiconductor inspection device and a semiconductor inspection method such that in a specimen image in a single field of view obtained by an electron microscope, it is possible to suppress variations in the edge position measurement error attributable to the materials and structures of the lower layers of measured patterns by a first method, wherein the area in the field of view obtained by electron beam scanning is divided into a plurality of regions on the basis of information regarding the structures and materials of the object to be observed and the electron beam scanning conditions are changed for individual regions (805, 806), a second method, wherein, the image processing conditions are changed for individual regions resulting from division of the obtained images, or a third method, wherein the edge detection conditions are changed for individual regions resulting from the division within the edge inspection regions of the obtained images.
摘要翻译： 提供一种半导体检查装置和半导体检查方法，使得在通过电子显微镜获得的单个视场中的样本图像中，可以抑制归因于下部的材料和结构的边缘位置测量误差的变化 通过第一方法测量图案层，其中通过电子束扫描获得的视野中的区域基于关于待观察物体的结构和材料的信息以及电子束扫描被分成多个区域 对于各个区域（805,806）的条件改变，第二种方法，其中，针对由所获得的图像的划分产生的各个区域改变图像处理条件，或者第三种方法，其中针对各个区域改变边缘检测条件 由获得的图像的边缘检查区域内的划分产生。
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