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公开(公告)号：US06434263B1
公开(公告)日：2002-08-13
申请号：US09579804
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as, to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
摘要翻译： 光学构件检查装置包括具有光源的检查光学系统和用于漫射从光源发射的光的漫射装置。 扩散装置具有中心部分和周边部分。 周边部分的扩散透射率高于中心部分的扩散透射率。 检查光学系统还设置有用于拾取要检查的光学构件的图像的图像拾取装置，并且被定位成接收从光源发射并透射通过漫射装置的光， 光学构件。 还根据从摄像装置输出的图像信号，提供判断装置，用于判断光学构件是否具有缺陷。
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公开(公告)号：US06427023B1
公开(公告)日：2002-07-30
申请号：US09580003
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US06636625B1
公开(公告)日：2003-10-21
申请号：US09579706
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US06363165B1
公开(公告)日：2002-03-26
申请号：US09580661
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
摘要翻译： 光学构件检查装置包括具有光源的检查光学系统和用于漫射从光源发射的光的漫射装置。 扩散装置具有中心部分和周边部分。 周边部分的扩散透射率高于中心部分的扩散透射率。 检查光学系统还设置有拾取被检查光学构件的图像的图像拾取装置，并且被定位成接收从光源发射并通过漫射装置传播的光并且 光学构件。 还根据从摄像装置输出的图像信号，提供判断装置，用于判断光学构件是否具有缺陷。
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公开(公告)号：US06788804B1
公开(公告)日：2004-09-07
申请号：US09579622
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US06477264B1
公开(公告)日：2002-11-05
申请号：US09580363
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US06476909B1
公开(公告)日：2002-11-05
申请号：US09580479
申请日：2000-05-26
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US5847822A
公开(公告)日：1998-12-08
申请号：US702042
申请日：1996-08-23
CPC分类号： G01N21/88
摘要： An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected. The inspection apparatus includes a diffusion plate, a device for emitting light towards the diffusion plate such that a diffused light diffused by the diffusion plate is incident upon an optical system including at least the optical element, and a device for intercepting a part of the diffused light so that the part of the diffused light is not incident upon the optical system. The light intercepting device is positioned substantially in a plane perpendicular to an optical axis of the optical system, between the optical system and the diffusion plate, substantially at a focal point of the optical system.
摘要翻译： 一种用于检测待检查的光学元件的光学缺陷的光学元件检查装置。 检查装置包括漫射板，用于朝向扩散板发射光的装置，使得由扩散板扩散的漫射光入射到至少包括光学元件的光学系统上，以及用于截取漫射板的一部分的装置 使得部分漫射光不入射到光学系统上。 遮光装置基本上位于与光学系统的光轴垂直的平面中，位于光学系统和漫射板之间，基本上位于光学系统的焦点处。
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公开(公告)号：US06697513B1
公开(公告)日：2004-02-24
申请号：US09583230
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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公开(公告)号：US06430310B1
公开(公告)日：2002-08-06
申请号：US09580045
申请日：2000-05-26
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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