公开(公告)号：US06566671B1

公开(公告)日：2003-05-20

申请号：US09593955

申请日：2000-06-15

申请人： Atsushi Yoshida ,  Shunji Maeda ,  Takafumi Okabe ,  Hisashi Mizumoto ,  Mitsunobu Isobe

发明人： Atsushi Yoshida ,  Shunji Maeda ,  Takafumi Okabe ,  Hisashi Mizumoto ,  Mitsunobu Isobe

IPC分类号： G01V800

CPC分类号： G01N21/95607

摘要： An apparatus and/or a method for inspecting fine defects on a substrate having minute patterns formed thereon as a target of inspection by detecting an image thereof with fine pixel size, wherein high speed processing is needed for position alignment over a wide region which is expanded equivalently therewith while obtaining a video processing circuit having a small size, wherein a video signal equal to or less than 0.2 &mgr;m in pixel size is obtained by using an optical system of DUV (far-ultraviolet) light or a video detection system of an electron beam. For instance, a search region for detecting position gaps is set at ±4 pixels, while on one substrate are mounted a plurality of video processing circuits, each being constructed with an LSI which can perform processing of k channels, thereby realizing a high-speed video processing portion having a small size.

摘要翻译： 一种用于通过以精细像素尺寸检测其图像来检查其上形成有微小图案的基板上的细小缺陷的装置和/或方法，其中检测其精细像素尺寸的图像，其中在扩展的广泛区域上需要高速处理以进行位置对准 同时获得具有小尺寸的视频处理电路，其中通过使用DUV（远紫外）光的光学系统或电子的视频检测系统获得像素尺寸等于或小于0.2μm的视频信号 光束。 例如，用于检测位置间隙的搜索区域被设置为±4像素，而在一个基板上安装有多个视频处理电路，每个视频处理电路由能够执行k个通道的处理的LSI构成，从而实现高速 视频处理部分具有小尺寸。