公开(公告)号：US20180204755A1

公开(公告)日：2018-07-19

申请号：US15872543

申请日：2018-01-16

Applicant: Axcelis Technologies, Inc.

Inventor： John F. Baggett ,  Billy Benoit

IPC: H01L21/683 ,  H01L21/687 ,  H01L21/265 ,  H01L21/67 ,  H01L21/677

Abstract: A workpiece processing system and method comprises transferring a workpiece to a vacuum chamber. A heated chuck is configured to selectively clamp a workpiece to a clamping surface thereof, wherein the heated chuck is configured to selectively heat the clamping surface. A workpiece transfer apparatus has an end effector configured to transfer the workpiece to the heated chuck, wherein the workpiece rests on the end effector. A controller selectively position the workpiece with respect to the heated chuck via a control of the workpiece transfer apparatus, wherein the controller is configured to position the workpiece at a predetermined distance from the clamping surface, wherein the predetermined distance generally determines an amount of radiation received by the workpiece from the heated chuck, and wherein the controller is further configured to place the workpiece on the surface of the heated chuck via a control of the workpiece transfer apparatus.

公开(公告)号：US10861731B2

公开(公告)日：2020-12-08

申请号：US15872543

申请日：2018-01-16

Applicant: Axcelis Technologies, Inc.

Inventor： John F. Baggett ,  Billy Benoit

IPC: H01L21/683 ,  H01L21/687 ,  H01L21/265 ,  H01L21/67 ,  H01L21/677 ,  H01J37/32

Abstract: A workpiece processing system and method comprises transferring a workpiece to a vacuum chamber. A heated chuck is configured to selectively clamp a workpiece to a clamping surface thereof, wherein the heated chuck is configured to selectively heat the clamping surface. A workpiece transfer apparatus has an end effector configured to transfer the workpiece to the heated chuck, wherein the workpiece rests on the end effector. A controller selectively position the workpiece with respect to the heated chuck via a control of the workpiece transfer apparatus, wherein the controller is configured to position the workpiece at a predetermined distance from the clamping surface, wherein the predetermined distance generally determines an amount of radiation received by the workpiece from the heated chuck, and wherein the controller is further configured to place the workpiece on the surface of the heated chuck via a control of the workpiece transfer apparatus.