FLOW RATE MEASURING UNIT AND FLOW RATE CONTROL UNIT

    公开(公告)号:US20170153651A1

    公开(公告)日:2017-06-01

    申请号:US15363640

    申请日:2016-11-29

    Applicant: Axetris AG

    CPC classification number: G05D7/0635 G01F1/40 G01F1/6842 G01F5/00 G01F15/00

    Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.

    FLOW RATE MEASURING UNIT AND FLOW RATE CONTROL UNIT

    公开(公告)号:US20170153133A1

    公开(公告)日:2017-06-01

    申请号:US15363498

    申请日:2016-11-29

    Applicant: Axetris AG

    CPC classification number: G01F1/42 G01F1/6842 G01F5/00 G01F5/005

    Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.

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