公开(公告)号：US09995607B2

公开(公告)日：2018-06-12

申请号：US15363498

申请日：2016-11-29

Applicant: Axetris AG

Inventor： Stefan Bürgi ,  Adrian Dänzer ,  Christoph Bächler

IPC: G01F1/42 ,  G01F5/00

CPC classification number: G01F1/42 ,  G01F1/6842 ,  G01F5/00 ,  G01F5/005

Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.

公开(公告)号：US10042368B2

公开(公告)日：2018-08-07

申请号：US15363640

申请日：2016-11-29

Applicant: Axetris AG

Inventor： Stefan Bürgi ,  Adrian Dänzer ,  Christoph Bächler

IPC: G01F1/68 ,  G05D7/06 ,  G01F1/684 ,  G01F5/00 ,  G01F1/40

CPC classification number: G05D7/0635 ,  G01F1/40 ,  G01F1/6842 ,  G01F5/00 ,  G01F15/00

Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.