公开(公告)号：US11340179B2

公开(公告)日：2022-05-24

申请号：US17076303

申请日：2020-10-21

Applicant: BAE Systems Information and Electronic Systems Integration Inc.

Inventor： Eugene M. Lavely ,  Amrita V. Masurkar ,  Thomas J. Stark

IPC: G01N23/00 ,  G01N23/2251

Abstract: Techniques are provided for tomographic imaging with sub-beam resolution and spectral enhancement. A system implementing the techniques according to an embodiment includes a target structure comprising one or more selected materials nanopatterned on a first surface of the target structure in a selected arrangement. The system also includes a primary particle beam source to provide a particle beam incident on an area of the first surface of the target structure, the area encompassing one or more of the nanopatterned materials, such that the materials generate characteristic X-rays in response to the primary beam. The system further includes a spectral energy detector (SED) to perform individual photon counting and spectral analysis of the characteristic X-rays and estimate attenuation properties of the imaged sample. The sample is positioned both adjacent to a second surface of the target structure, opposite the first surface, and between the target structure and the SED.

公开(公告)号：US20210116400A1

公开(公告)日：2021-04-22

申请号：US17076303

申请日：2020-10-21

Applicant: BAE Systems Information and Electronic Systems Integration Inc.

Inventor： Eugene M. Lavely ,  Amrita V. Masurkar ,  Thomas J. Stark

IPC: G01N23/2251

Abstract: Techniques are provided for tomographic imaging with sub-beam resolution and spectral enhancement. A system implementing the techniques according to an embodiment includes a target structure comprising one or more selected materials nanopatterned on a first surface of the target structure in a selected arrangement. The system also includes a primary particle beam source to provide a particle beam incident on an area of the first surface of the target structure, the area encompassing one or more of the nanopatterned materials, such that the materials generate characteristic X-rays in response to the primary beam. The system further includes a spectral energy detector (SED) to perform individual photon counting and spectral analysis of the characteristic X-rays and estimate attenuation properties of the imaged sample. The sample is positioned both adjacent to a second surface of the target structure, opposite the first surface, and between the target structure and the SED.