Dustproof structure for laser output window of laser, and laser

    公开(公告)号:US20240235144A1

    公开(公告)日:2024-07-11

    申请号:US18603253

    申请日:2024-03-13

    CPC classification number: H01S3/0346 H01S3/036

    Abstract: A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.

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