公开(公告)号：US20230409784A1

公开(公告)日：2023-12-21

申请号：US18459424

申请日：2023-09-01

Applicant: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Zebin FENG ,  Sai LIANG ,  Xiangyu XU ,  Rui JIANG ,  Guangyi LIU ,  Bin LIU ,  Pei CAO

IPC: G06F30/27

CPC classification number: G06F30/27

Abstract: Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.

公开(公告)号：US20240235144A1

公开(公告)日：2024-07-11

申请号：US18603253

申请日：2024-03-13

Applicant: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Jinsong WU ,  Bin LIU ,  Xiangyu XU ,  Guangyi LIU ,  Rui JIANG ,  Wenbin CHEN

IPC: H01S3/034 ,  H01S3/036

CPC classification number: H01S3/0346 ,  H01S3/036

Abstract: A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.