公开(公告)号：US20230409784A1

公开(公告)日：2023-12-21

申请号：US18459424

申请日：2023-09-01

Applicant: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Zebin FENG ,  Sai LIANG ,  Xiangyu XU ,  Rui JIANG ,  Guangyi LIU ,  Bin LIU ,  Pei CAO

IPC: G06F30/27

CPC classification number: G06F30/27

Abstract: Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.