公开(公告)号：US20220356564A1

公开(公告)日：2022-11-10

申请号：US17637064

申请日：2020-12-29

申请人： BOCHVAR HIGH-TECHNOLOGY RESEARCHI NSTITUTE FOR INORGANIC MATERIALS

发明人： Leonid Aleksandrovich KARPYUK ,  Vladislav Konstantinovich ORLOV ,  Sergey Igorevich IVANOV ,  Alexey Vladimirovich GLEBOV ,  Fyodor Viktorovich MAKAROV ,  Roman Gennadyevich ZAKHAROV ,  Ivan Alexandrovich DZYUBINSKY ,  Alexander Pavlovich PONOMARENKO ,  Alexander Dmitrievich BAGDATYEV

IPC分类号： C23C16/32 ,  C23C16/26 ,  C23C16/01 ,  G21C3/07 ,  D04C1/02 ,  D04C1/12 ,  C04B41/00 ,  C04B41/50 ,  C04B41/45 ,  C04B41/52 ,  C04B41/87

摘要： The method includes forming an inner monolithic layer from crystals of beta phase stoichiometric silicon carbide on a carbon substrate in the form of a rod by chemical methylsilane vapor deposition in a sealed tubular hot-wall CVD reactor. The method further includes forming a central composite layer over the inner monolithic layer by twisting continuous beta phase stoichiometric silicon carbide fibers into tows, transporting the tows to a braiding machine, and forming a reinforcing thread framework. A pyrocarbon interface coating is built up by chemical methane vapor deposition in a sealed tubular hot-wall CVD reactor. Then, a matrix is formed by chemical methylsilane vapor deposition in the reactor. A protective outer monolithic layer is formed from crystals of beta phase stoichiometric silicon carbide over the central composite layer by chemical methylsilane vapor deposition in a CVD reactor. And then the carbon substrate is removed from the fabricated semi-finished product.