公开(公告)号：US20250113682A1

公开(公告)日：2025-04-03

申请号：US18292588

申请日：2022-11-02

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Chengfei WANG ,  Junwei YAN ,  Zhonglin CHEN ,  Ren ZHOU ,  Jinxin AN ,  Ze REN ,  Guanghui PEI ,  Dajun WANG

IPC: H10H29/03 ,  H01L21/66 ,  H01L21/68 ,  H01L25/075

Abstract: A multi-coordinate system calibration and equipment alignment method includes: determining a first mapping relationship between a first image pixel coordinate system of an intermediate carrier substrate carrying stage and a world coordinate system; determining a second mapping relationship between a second image pixel coordinate system of a backplane carrying stage and the world coordinate system; determining galvanometer start point coordinates in the world coordinate system; obtaining first template calibration coordinates in the world coordinate system by using the first mapping relationship and the galvanometer start point coordinates; obtaining second template calibration coordinates in the world coordinate system by using the second mapping relationship and the galvanometer start point coordinates; aligning the intermediate carrier substrate based on actual coordinates of the intermediate carrier substrate carrying stage and the first template calibration coordinates; and aligning the backplane based on actual coordinates of the backplane carrying stage and the second template calibration coordinates.