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公开(公告)号：US20180247848A1
公开(公告)日：2018-08-30
申请号：US15730756
申请日：2017-10-12
发明人： Hanbo ZHENG , Li LI , Junwei YAN , Changhai FENG
IPC分类号： H01L21/673 , B25B11/00
CPC分类号： H01L21/67393 , B25B11/005 , H01L21/67383 , H05K2203/0195
摘要： The present disclosure discloses a vacuum adsorption unit and a vacuum adsorption carrier, wherein the vacuum adsorption unit comprises: a housing defining an air path through-hole therein, the air path through-hole provided with an upper abutting surface and a lower abutting surface; a piston movable provided in the air path through-hole and is located between the upper abutting surface and the lower abutting surface; an outer peripheral wall of the piston is slidably matched with an inner peripheral wall of the air path through-hole; an elastic member having both ends that respectively abut against the housing and the piston, to constantly drive the piston to abut on the upper abutting surface; and a pressure relief passage communicated with the air path through-hole, and is configured to be closed only when the piston moves to abut against the lower abutting surface.
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公开(公告)号：US20220238391A1
公开(公告)日：2022-07-28
申请号：US17483613
申请日：2021-09-23
发明人： Shaodong SUN , Haoran GAO , Guangcai YUAN , Lilei ZHANG , Wenyue FU , Li LI , Hanbo ZHENG , Shuqi LIU , Qi QI , Junwei YAN , Pingkuan GU , Lina JING , Yan CHEN , Yimin CHEN
摘要： The present disclosure relates to a device and a system for testing flatness. The device for testing flatness includes a base, a testing platform, and a ranging sensor. The testing platform is assembled on the base. The testing platform includes a supporting structure. The supporting structure is disposed on the side of the testing platform away from the base and is used to support a to-be-tested board. The structure matches the structure of the to-be-tested board. The ranging sensor is disposed on the side of the testing platform away from the base. After the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2. According to the embodiments of the present disclosure, the flatness of the glass substrate can be tested to improve the manufacturing process to reduce the flatness of the glass substrate, and avoid the problem that the glass substrate is easily broken when entering the subsequent process equipment and the process equipment is down.
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