High sensitivity pressure sensor package

    公开(公告)号:US11137308B2

    公开(公告)日:2021-10-05

    申请号:US16238207

    申请日:2019-01-02

    IPC分类号: G01L13/02 G01L19/06

    摘要: A pressure sensing package includes a sensor chamber and an annular chamber extending about the sensor chamber. A primary diaphragm divides the sensor chamber into a first part receiving a first pressure and a second part including a differential pressure sensor approximately centered with respect to a sensor axis and a first transmission fluid. The first transmission fluid transmits the first pressure to a first differential pressure sensor face. A secondary diaphragm divides the annular chamber into a first part receiving a second pressure and a second part including a second transmission fluid. The second pressure is transmitted to a second pressure sensor face via the secondary diaphragm and the second transmission fluid. The primary and secondary diaphragms are positioned with respect to one another along the sensor axis direction such that pressures other than the first and second pressures acting on the pressure sensor sum to approximately zero.

    HIGH SENSITIVITY PRESSURE SENSOR PACKAGE
    2.
    发明申请

    公开(公告)号:US20200209090A1

    公开(公告)日:2020-07-02

    申请号:US16238207

    申请日:2019-01-02

    IPC分类号: G01L13/02 G01L19/06

    摘要: A pressure sensing package includes a sensor chamber and an annular chamber extending about the sensor chamber. A primary diaphragm divides the sensor chamber into a first part receiving a first pressure and a second part including a differential pressure sensor approximately centered with respect to a sensor axis and a first transmission fluid. The first transmission fluid transmits the first pressure to a first differential pressure sensor face. A secondary diaphragm divides the annular chamber into a first part receiving a second pressure and a second part including a second transmission fluid. The second pressure is transmitted to a second pressure sensor face via the secondary diaphragm and the second transmission fluid. The primary and secondary diaphragms are positioned with respect to one another along the sensor axis direction such that pressures other than the first and second pressures acting on the pressure sensor sum to approximately zero.