公开(公告)号：US09976911B1

公开(公告)日：2018-05-22

申请号：US15196679

申请日：2016-06-29

Applicant: Beam Engineering for Advanced Materials Co.

Inventor： Nelson V. Tabirian ,  Zhi J. Liao

IPC: G01J9/00

CPC classification number: G01J9/00 ,  G01J1/0411 ,  G01J1/4257 ,  G01J2009/002

Abstract: Sensors, devices, apparatus, systems and methods for replacing microlens arrays with one or more switchable diffractive waveplate microlens arrays for providing measurements of wavefronts and intensity distribution in light beams with high spatial resolution with a single optical radiation sensor. The device acts like a conventional Shack-Hartmann wavefront sensor when the microlens array elements are in focusing state, and the device performs light beam intensity profile characterization acting as a beam profiler when the optical power of lens array elements is switched off.