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公开(公告)号:US4401052A
公开(公告)日:1983-08-30
申请号:US362095
申请日:1982-03-26
CPC分类号: H01L31/1876 , C23C14/24 , C23C14/56 , Y02E10/50 , Y02P70/521
摘要: An apparatus to deposit material on a substrate, such as in the making of thin solar cells, consists of two chambers. A manifold chamber having a plurality of spaces nozzles assures efficient and uniform deposition on a substrate. The rate of depositions is controlled by an orifice in a passageway connecting the manifold chamber to an evaporation chamber.
摘要翻译: 在诸如制造薄太阳能电池的衬底上沉积材料的装置由两个室组成。 具有多个空间喷嘴的歧管腔确保在衬底上有效且均匀的沉积。 沉积速率由将歧管室连接到蒸发室的通道中的孔控制。
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公开(公告)号:US4325986A
公开(公告)日:1982-04-20
申请号:US43317
申请日:1979-05-29
CPC分类号: C23C14/24 , C23C14/56 , H01L31/18 , H01L31/1828 , H01L31/1876 , Y02E10/543 , Y02P70/521
摘要: An apparatus to deposit material on a substrate, such as in the making of thin film solar cells, consists of two chambers. A manifold chamber having a plurality of spaced nozzles assures efficient and uniform deposition on a substrate. The rate of depositions is controlled by an orifice in a passageway connecting the manifold chamber to an evaporation chamber.
摘要翻译: 在诸如制造薄膜太阳能电池的衬底上沉积材料的装置由两个室组成。 具有多个间隔开的喷嘴的歧管腔确保了在衬底上的有效且均匀的沉积。 沉积速率由将歧管室连接到蒸发室的通道中的孔控制。
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公开(公告)号:US4318938A
公开(公告)日:1982-03-09
申请号:US43315
申请日:1979-05-29
IPC分类号: H01L31/0336 , H01L31/048 , H01L31/18
CPC分类号: H01L31/18 , H01L31/03365 , H01L31/048 , H01L31/1876 , Y02E10/50 , Y02P70/521 , Y10S148/006 , Y10S148/12
摘要: A technique for manufacturing durable, reliable solar cells by a continuous process suitable for large-scale manufacture involves, in substance, providing a reel of thin metal foil substrate and forming on the substrate a series of layers operative to form a photovoltaic junction, short prevention blocking layers, contacts and integral encapsulation. The foil substrate is processed as a continuous reel substantially until final testing at which point, if desired, it can be cut into individual cells for deployment. In comparison with a batch process, the continuous technique can reduce manufacturing cost by as much as a factor of two.
摘要翻译: 通过适用于大规模制造的连续工艺来制造耐用且可靠的太阳能电池的技术实质上包括提供一卷薄金属薄片基板,并在基板上形成一系列可操作以形成光伏结的层,防止短路 阻挡层,触点和整体封装。 将箔基材作为连续的卷筒进行处理,直到最终测试为止,此时如果需要,可将其切割成用于展开的各个单元。 与批处理相比,连续技术可以将制造成本降低多达两倍。
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