公开(公告)号：US09291586B2

公开(公告)日：2016-03-22

申请号：US14398315

申请日：2013-05-05

申请人： Board of Regents, The University of Texas System

发明人： Dean P. Neikirk ,  Praveenkumar Pasupathy ,  Sheng Zhang ,  Brad Leonhardt ,  John G. Ekerdt ,  Brian A. Korgel ,  Vincent C. Holmberg ,  Catherine D. Shipman ,  Timothy D. Bogart ,  Aaron Chockla

IPC分类号： G01R27/32 ,  G01N27/04 ,  G01N27/08

CPC分类号： G01N27/04 ,  G01N27/08

摘要： A sensor for detecting one or more materials includes a substrate, a passivation layer formed on the substrate, a self-resonant structure and a high surface area material disposed on the passivation layer. The self-resonant structure includes a planar spiral inductor and a plurality of planar interdigitated capacitor electrodes disposed within the passivation layer. The planar spiral inductor includes an electrically conductive trace formed on the substrate in a planar spiral pattern having at least two turns and an inter-winding space between parallel segments of the electrically conductive trace. The plurality of planar interdigitated capacitor electrodes are electrically connected to the electrically conductive trace of the planar spiral inductor and formed on the substrate within the inter-winding space of at least one outermost turn of the planar spiral inductor. The high surface area material includes a conformal polymer coating to increase a sensitivity to the one or more materials.

摘要翻译： 用于检测一种或多种材料的传感器包括衬底，形成在衬底上的钝化层，设置在钝化层上的自谐振结构和高表面积材料。 自谐振结构包括平面螺旋电感器和设置在钝化层内的多个平面交错电容器电极。 平面螺旋电感器包括形成在基板上的导电迹线，平面螺旋图案具有至少两匝以及在导电迹线的平行段之间的绕组间距。 多个平面交错电容器电极电连接到平面螺旋电感器的导电迹线，并且形成在平面螺旋电感器的至少一个最外圈的绕组间空间内的衬底上。 高表面积材料包括保形聚合物涂层以增加对一种或多种材料的敏感性。

公开(公告)号：US20150123678A1

公开(公告)日：2015-05-07

申请号：US14398315

申请日：2013-05-05

申请人： Board of Regents, The University of Texas System

发明人： Dean P. Neikirk ,  Praveen K. Pasupathy ,  Sheng Zhang ,  Brad Leonhardt ,  John G. Ekerdt ,  Brian A. Korgel ,  Vincent C. Holmberg ,  Catherine D. Shipman ,  Timothy D. Bogart ,  Aaron Chockla

IPC分类号： G01N27/04

CPC分类号： G01N27/04 ,  G01N27/08

摘要： A sensor for detecting one or more materials includes a substrate, a passivation layer formed on the substrate, a self-resonant structure and a high surface area material disposed on the passivation layer. The self-resonant structure includes a planar spiral inductor and a plurality of planar interdigitated capacitor electrodes disposed within the passivation layer. The planar spiral inductor includes an electrically conductive trace formed on the substrate in a planar spiral pattern having at least two turns and an inter-winding space between parallel segments of the electrically conductive trace. The plurality of planar interdigitated capacitor electrodes are electrically connected to the electrically conductive trace of the planar spiral inductor and formed on the substrate within the inter-winding space of at least one outermost turn of the planar spiral inductor. The high surface area material includes a conformal polymer coating to increase a sensitivity to the one or more materials.

摘要翻译： 用于检测一种或多种材料的传感器包括衬底，形成在衬底上的钝化层，设置在钝化层上的自谐振结构和高表面积材料。 自谐振结构包括平面螺旋电感器和设置在钝化层内的多个平面交错电容器电极。 平面螺旋电感器包括形成在基板上的导电迹线，平面螺旋图案具有至少两匝以及在导电迹线的平行段之间的绕组间距。 多个平面交错电容器电极电连接到平面螺旋电感器的导电迹线，并且形成在平面螺旋电感器的至少一个最外圈的绕组间空间内的衬底上。 高表面积材料包括保形聚合物涂层以增加对一种或多种材料的敏感性。