公开(公告)号：US06580266B2

公开(公告)日：2003-06-17

申请号：US10053016

申请日：2001-11-02

申请人： Bradley Frederick Baumgartner ,  Shanlin Duan ,  Yan Liu ,  Bob C. Robinson ,  Li Tang ,  Ka Chi Wong

发明人： Bradley Frederick Baumgartner ,  Shanlin Duan ,  Yan Liu ,  Bob C. Robinson ,  Li Tang ,  Ka Chi Wong

IPC分类号： G01R3312

CPC分类号： G11B20/1883 ,  G01R33/1207 ,  G11B5/012 ,  G11B5/82 ,  G11B19/04 ,  G11B20/1816 ,  G11B27/36 ,  G11B33/10 ,  G11B2005/001 ,  G11B2220/20 ,  Y10T29/47

摘要： An apparatus and method for detecting and marking delamination defects on thin film disks are disclosed. The apparatus includes a read/write (R/W) head and a burnishing head mounted on separate arms that access the disk while spinning on the test stand. The controller uses the R/W head to perform an initial magnetic test of selected areas on the disk to establish an initial defect map. The burnish head is then flown over the surface for an extended time to accelerate and open up the latent delamination defects by impacting protruding material. The R/W head is then used to perform a second magnetic test which is compared against the first test to identify the delamination defects which have been developed by the burnishing. The delamination defects are then marked with a magnetic pattern which aids in optically locating the defect during subsequent failure analysis.

摘要翻译： 公开了一种用于检测和标记薄膜盘上的分层缺陷的装置和方法。 该装置包括读/写（R / W）头和安装在单独的臂上的抛光头，当在测试台上旋转时，其读取磁盘。 控制器使用R / W头对磁盘上所选区域进行初始磁性测试，以建立初始缺陷图。 然后将抛光头在表面上飞过较长时间，以加速并通过冲击突出的材料来打开潜在的脱层缺陷。 然后使用R / W头执行第二磁性测试，其与第一次测试进行比较，以识别由抛光开发的分层缺陷。 然后用磁性图案标记分层缺陷，这有助于在随后的故障分析期间光学地定位缺陷。