公开(公告)号：US20040110089A1

公开(公告)日：2004-06-10

申请号：US10679521

申请日：2003-10-06

Applicant: Brewer Science Inc.

Inventor： Charles J. Neef ,  Mandar Bhave ,  Michelle Fowler ,  Michelle Windsor

IPC: G03C001/76 ,  G03C005/00

CPC classification number: G03F7/091 ,  C09B69/00 ,  Y10S430/111 ,  Y10T428/31511 ,  Y10T428/31515

Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

Abstract translation: 提供了包含小分子（例如小于约5,000g / mol）代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。 在一个实施方案中，使用芳族羧酸作为发色团，并将所得化合物与交联剂和酸共混。 与高分子量聚合物抗反射涂膜相比，根据本发明制备的抗反射涂膜显示出改进的性能。 小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。 使用本发明材料进行的光刻工艺产生独立的110nm轮廓。