公开(公告)号：US20060164650A1

公开(公告)日：2006-07-27

申请号：US11040382

申请日：2005-01-21

申请人： Brittan Zurn ,  Richard Beaudet ,  Thomas Savard ,  Leroy Thielman ,  Rodney Thorland

发明人： Brittan Zurn ,  Richard Beaudet ,  Thomas Savard ,  Leroy Thielman ,  Rodney Thorland

IPC分类号： G01C19/64

CPC分类号： G01C19/662 ,  G01C19/665

摘要： A ring laser gyroscope is described which includes a laser cavity configured to provide an optical laser path for a pair of counter-propagating laser beams, an optical sensor configured to receive a portion of the energy from the counter-propagating laser beams, and a unit configured to receive outputs from the optical sensor. The unit is configured to utilize the output to generate at least a residual path length control signal, a laser intensity monitor signal, and readout signals.

摘要翻译： 描述了环形激光陀螺仪，其包括被配置为提供用于一对反向传播的激光束的光学激光路径的激光腔，被配置为从反向传播的激光束接收能量的一部分的光学传感器，以及单元 被配置为接收来自光学传感器的输出。 该单元被配置为利用输出来产生至少残留路径长度控制信号，激光强度监视信号和读出信号。

公开(公告)号：US20050268716A1

公开(公告)日：2005-12-08

申请号：US11160062

申请日：2005-06-07

申请人： Albert Hrovat ,  Randolph Hartman ,  Thomas Savard ,  William Platt

发明人： Albert Hrovat ,  Randolph Hartman ,  Thomas Savard ,  William Platt

IPC分类号： G01C19/56 ,  G01P15/08

CPC分类号： G01C19/5719

摘要： The present invention provides a MEMS vibratory type inertial sensor that has some level of built in test to help improve the reliability by helping to identify erroneous or misleading data provided by the inertial sensor. In one illustrative embodiment, a test signal is injected into one or more of the inputs of the MEMS vibratory type inertial sensor, where the test signal produces a test signal component at one or more of the MEMS vibratory type inertial sensor outputs. The test signal component is then monitored at one or more of the outputs. If the test signal component matches at least predetermined characteristics of the original test signal, it is more likely that the MEMS vibratory type inertial sensor is operating properly and not producing erroneous or misleading data. In some embodiments, the test signal is provided and monitored during the normal functional operation of the MEMS vibratory type inertial sensor, thereby providing on-going built in test.

摘要翻译： 本发明提供一种具有一定程度的内置测试的MEMS振动型惯性传感器，以通过帮助识别由惯性传感器提供的错误或误导数据来提高可靠性。 在一个说明性实施例中，将测试信号注入到MEMS振动型惯性传感器的一个或多个输入中，其中测试信号在一个或多个MEMS振动型惯性传感器输出端产生测试信号分量。 然后在一个或多个输出端监测测试信号分量。 如果测试信号分量与原始测试信号的至少预定特性匹配，则MEMS振动式惯性传感器更可能正常运行并且不产生错误或误导性的数据。 在一些实施例中，在MEMS振动型惯性传感器的正常功能操作期间提供和监视测试信号，从而提供正在进行的内置测试。

公开(公告)号：US20060028654A1

公开(公告)日：2006-02-09

申请号：US11243866

申请日：2005-10-05

申请人： Daniel Fashant ,  Thomas Savard ,  Tracy Sellin ,  Steven Ecklund

发明人： Daniel Fashant ,  Thomas Savard ,  Tracy Sellin ,  Steven Ecklund

IPC分类号： G01B9/02

CPC分类号： G02B21/0016

摘要： A method for determining a surface quality of a substrate sample using a differential interference contrast microscope is described. The microscope includes an eyepiece, an eyepiece focus adjustment, a microscope focus adjustment, a light source, at least one of an aperture or reticule, a camera view, a prism and an eyepiece. The method includes calibrating the focus of the eyepiece with the focus of the camera and determining a peak response ratio for the microscope through adjustment of phase between differential beams of the microscope. The substrate sample is placed under the microscope, illuminated with the light source, and brought into focus with the microscope focus. Phase between differential beams is adjusted, at least one image of the substrate sample is captured and processed to determine a level of surface structure on the substrate sample.