Near field scanning acoustic microscope and method
    1.
    发明授权
    Near field scanning acoustic microscope and method 失效
    近场扫描声学显微镜及方法

    公开(公告)号:US5077695A

    公开(公告)日:1991-12-31

    申请号:US434236

    申请日:1989-11-13

    IPC分类号: G01N29/06 G01N29/22 G01S15/89

    摘要: An acoustic microscope in which acoustic energy is focused onto a membrane which includes an aperture which is a fraction of the size of the focal spot of the acoustic beam at the membrane to form fringing fields on the other side of the membrane. Acoustic energy reflected from the membrane is detected. An object to be examined is placed in cooperative relationship with the fringing fields.

    摘要翻译: 一种声学显微镜,其中声能聚焦在膜上,该膜包括孔,该孔是膜的声束的焦点尺寸的一部分,以在膜的另一侧上形成边缘场。 检测从膜反射的声能。 被检查对象与边缘领域保持合作关系。