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公开(公告)号:US20130256517A1
公开(公告)日:2013-10-03
申请号:US13905038
申请日:2013-05-29
Applicant: CADENT LTD.
Inventor: Noam Babayoff , Yossef Atiya , Tzvi Philipp
IPC: G01J1/04
CPC classification number: G01J1/0448 , G02B21/0056 , G02B21/006 , G02B21/008 , G02B27/48 , G03H1/32
Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.
Abstract translation: 一种适于非平坦样本的共焦成像的设备,包括用于产生光束的相干光源,适于将光束聚焦到样本表面上的至少一个点的成像光学器件,以及适于接收和 检测从样品表面反射的光。 成像光学器件包括至少一个光学部件,其被定位成使得从检测器表面反射的光在通过检测器的途中穿过其中。 在检测器的积分时间内,光学部件是可移动的,以便将运动范围内的至少一个光点移动到与装置的光轴垂直的平面中的多个不同位置。