公开(公告)号：US20160003613A1

公开(公告)日：2016-01-07

申请号：US14323225

申请日：2014-07-03

Applicant: Cadent Ltd.

Inventor： Yossef Atiya ,  Tal Verker

IPC: G01B11/25 ,  A61C9/00

CPC classification number: G01B11/25 ,  A61B1/00009 ,  A61B1/04 ,  A61B1/06 ,  A61B1/0638 ,  A61B1/24 ,  A61B5/0088 ,  A61B5/1076 ,  A61B5/1079 ,  A61B5/4547 ,  A61C1/088 ,  A61C9/006 ,  A61C9/0066 ,  G01B11/24 ,  G01B2210/50

Abstract: A system for determining surface topography of a three-dimensional structure is provided. The system can include an illumination unit configured to output a two-dimensional array of light beams each comprising a plurality of wavelengths. An optical assembly can focus the plurality of wavelengths of each light beam to a plurality of focal lengths so as to simultaneously illuminate the structure over a two-dimensional field of view. A detector and a processor are used to generate data representative of the surface topography of the three-dimensional structure based on the measured characteristics of the light reflected from the structure.

Abstract translation: 提供了一种用于确定三维结构的表面形貌的系统。 该系统可以包括被配置为输出每个包括多个波长的光束的二维阵列的照明单元。 光学组件可以将每个光束的多个波长聚焦成多个焦距，以便同时在二维视场上照亮结构。 基于从结构反射的光的测量特性，使用检测器和处理器来产生表示三维结构的表面形貌的数据。

公开(公告)号：US20160000535A1

公开(公告)日：2016-01-07

申请号：US14323215

申请日：2014-07-03

Applicant: Cadent Ltd.

Inventor： Yossef Atiya ,  Tal Verker

IPC: A61C9/00 ,  A61B1/00 ,  A61B1/247 ,  A61B1/06 ,  A61C1/08 ,  A61B5/00

CPC classification number: A61C9/0066 ,  A61B1/00009 ,  A61B1/00011 ,  A61B1/00045 ,  A61B1/0676 ,  A61B1/247 ,  A61B5/0013 ,  A61B5/0022 ,  A61B5/0088 ,  A61B5/7228 ,  A61B2562/0233 ,  A61C1/088 ,  A61C9/0046 ,  A61C9/0053 ,  G01B11/24 ,  G01B11/30

Abstract: An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe and an illumination unit configured to output a plurality of light beams. In many embodiments, the apparatus includes a light focusing assembly. The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic.

Abstract translation: 描述了一种用于确定三维结构的表面形貌的装置。 该装置可以包括探针和被配置为输出多个光束的照明单元。 在许多实施例中，该装置包括光聚焦组件。 光聚焦组件可以将多个光束中的每一个接收并聚焦到相应的外部焦点。 光聚焦组件可以被配置为与聚焦改变组件内的多个光束重叠，以沿着光束的传播方向移动外部焦点。 该装置可以包括检测器，其具有被配置为测量从照明点返回的多个光束中的每一个的特性的感测元件的阵列，以及耦合到检测器的处理器，并且被配置为产生代表结构的形貌的数据，基于 测量特性。

公开(公告)号：US20130256517A1

公开(公告)日：2013-10-03

申请号：US13905038

申请日：2013-05-29

Applicant: CADENT LTD.

Inventor： Noam Babayoff ,  Yossef Atiya ,  Tzvi Philipp

IPC: G01J1/04

CPC classification number: G01J1/0448 ,  G02B21/0056 ,  G02B21/006 ,  G02B21/008 ,  G02B27/48 ,  G03H1/32

Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.

Abstract translation: 一种适于非平坦样本的共焦成像的设备，包括用于产生光束的相干光源，适于将光束聚焦到样本表面上的至少一个点的成像光学器件，以及适于接收和 检测从样品表面反射的光。 成像光学器件包括至少一个光学部件，其被定位成使得从检测器表面反射的光在通过检测器的途中穿过其中。 在检测器的积分时间内，光学部件是可移动的，以便将运动范围内的至少一个光点移动到与装置的光轴垂直的平面中的多个不同位置。