公开(公告)号：US20240346209A1

公开(公告)日：2024-10-17

申请号：US18754396

申请日：2024-06-26

Applicant: CANON KABUSHIKI KAISHA

Inventor： TOSIYA ASANO ,  JUNICHI SEKI ,  YUICHIRO OGUCHI

IPC: G06F30/23 ,  G03F7/00 ,  G06F113/08

CPC classification number: G06F30/23 ,  G03F7/0002 ,  G06F2113/08

Abstract: The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, wherein for each of the plurality of droplets of the curable composition, a distance from a representative point of the droplet to a point on a contour of the droplet is obtained so as to match the area of the inner region of the contour to an area of the droplet obtained from a volume of the droplet and a distance between the first member and the second member in accordance with a change of the distance between the first member and the second member.