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公开(公告)号：US09753278B2
公开(公告)日：2017-09-05
申请号：US14372429
申请日：2012-12-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kyota Nozu , Yasuhiro Shimada , Koichiro Nakanishi
CPC classification number: G02B26/0816 , G02B7/182 , G02B26/0825 , G02B26/0841 , H02N1/006 , H02N1/008
Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.
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公开(公告)号：US20140362460A1
公开(公告)日：2014-12-11
申请号：US14372429
申请日：2012-12-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kyota Nozu , Yasuhiro Shimada , Koichiro Nakanishi
CPC classification number: G02B26/0816 , G02B7/182 , G02B26/0825 , G02B26/0841 , H02N1/006 , H02N1/008
Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.
Abstract translation: 本发明采用致动器，其包括：连接到具有反射表面的反射部件的可动部分; 可动梳状电极，其设置在与所述反射构件一定距离的位置，由所述可动部支撑并且在与所述反射面平行的方向上延伸; 由支撑部支撑的固定梳状电极在与反射面平行的方向上延伸，与可动梳状电极交替配置; 以及电压控制器，其向可动梳状电极和固定梳状电极施加电压，以使得可动梳状电极和可动部分沿垂直于反射表面的方向移位。 支撑可动梳状电极的部分和支撑静止梳状电极的部分被配置成使得可动梳状电极和固定梳状电极相互通过。
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3.发明申请ACTUATOR, DEFORMABLE MIRROR, ADAPTIVE OPTICS SYSTEM USING THE DEFORMABLE MIRROR, AND SCANNING LASER OPHTHALMOSCOPE USING THE ADAPTIVE OPTICS SYSTEM 审中-公开执行器，可变形镜，使用可变形镜的自适应光学系统和使用自适应光学系统的扫描激光眼镜公开(公告)号：US20140125950A1
公开(公告)日：2014-05-08
申请号：US14059700
申请日：2013-10-22
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yasuhiro Shimada , Hiroyuki Ozaki , Kenji Tamamori
CPC classification number: H02N1/008 , A61B3/1225 , A61B3/14 , G02B26/0841
Abstract: Provided is an actuator including a substrate, a movable portion provided so as to be movable with respect to the substrate, at least three elastic bodies for supporting the movable portion to the substrate in a displaceable manner, a movable comb electrode supported by the movable portion and extending in a direction parallel to a surface of the substrate, and a fixed comb electrode supported by the substrate and extending in the direction parallel to the surface of the substrate in which the movable comb electrode and the fixed comb electrode are arranged so as to be alternately engaged with each other with a distance, and each of all of the elastic bodies has a long axis that forms an angle of more than 90° and 180° or less with respect to at least one of the other elastic bodies.
Abstract translation: 提供一种致动器，包括：基板，设置成能够相对于基板移动的可动部;至少三个弹性体，用于以可移动的方式将可移动部分支撑到基板;活动梳状电极，由可动部分支撑; 并且在与基板的表面平行的方向上延伸;以及固定梳状电极，其由所述基板支撑并且在与所述基板的表面平行的方向上延伸，在所述基板的表面上配置有所述可动梳状电极和所述固定梳状电极， 交替地彼此接合一定距离，并且所有弹性体中的每一个具有相对于至少一个其它弹性体形成大于90°和180°或更小的角度的长轴。
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公开(公告)号：US20170329128A1
公开(公告)日：2017-11-16
申请号：US15666431
申请日：2017-08-01
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kyota Nozu , Yasuhiro Shimada , Koichiro Nakanishi
Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.
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公开(公告)号：US10126190B2
公开(公告)日：2018-11-13
申请号：US15310421
申请日：2015-04-24
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yasuhiro Soeda , Yasuhiro Shimada
Abstract: A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.
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Patent Agency Ranking
公开(公告)号：US09468376B2
公开(公告)日：2016-10-18
申请号：US14065212
申请日：2013-10-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yasuhiro Shimada , Masato Yajima
CPC classification number: A61B3/14 , A61B3/1015 , A61B3/102
Abstract: An ophthalmologic apparatus includes an aberration measuring unit configured to measure wavefront aberration of returning light, and a reflective optical modulation device configured to modulate the returning light. A control unit controls the reflective optical modulation device to correct the wavefront aberration of the returning light based on a measurement result of the aberration measuring unit. The reflective optical modulation device includes a reflection mirror of which the diameter of an effective region (effective diameter) that reflects the measurement light or the returning beam is 7.5 mm or less, and 61 or more actuators that act on the reflection mirror within the effective diameter. Each of the actuators includes an interdigital electrode having a maximum displacement of 7.5 μm or more.
Abstract translation: 一种眼科装置，包括：测量返回光的波前像差的像差测量单元;以及配置成调制返回光的反射型光调制装置。 控制单元基于像差测量单元的测量结果控制反射光调制装置校正返回光的波前像差。 反射光调制装置包括：反射测定光或返回光束的有效区域（有效直径）的直径为7.5mm以下的反射镜，以及作用于反射镜内的有效区域 直径。 每个致动器包括具有7.5μm或更大的最大位移的交叉指状电极。
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公开(公告)号：US20140126034A1
公开(公告)日：2014-05-08
申请号：US14066017
申请日：2013-10-29
Applicant: Canon Kabushiki Kaisha
Inventor： Hiroyuki Ozaki , Yasuhiro Shimada , Koichiro Nakanishi , Akira Shimazu , Kenji Tamamori
IPC: G02B26/08
CPC classification number: G02B26/0841 , Y10T29/49124
Abstract: In the method of manufacturing a micro structure including a membrane in a first substrate, a movable portion, a movable comb electrode, a suppressing unit, a support portion, and a fixed comb electrode are formed, and the movable portion of the first substrate and a second substrate are bonded. Then, the bonded second substrate is processed to form a membrane such as a reflecting portion. The movable comb electrode is supported by the movable portion and extends in a direction parallel to the membrane surface. The suppressing unit suppresses displacement of the movable comb electrode and the movable portion in a direction other than a direction normal to the membrane surface. The fixed comb electrode is supported by the support portion and extends in the direction parallel to the membrane surface. The fixed comb electrode is alternately arranged with respect to the movable comb electrode with a gap therebetween.
Abstract translation: 在制造包括第一基板中的膜的微结构的方法中，形成可移动部分，可移动梳状电极，抑制单元，支撑部分和固定梳状电极，并且第一基板的可移动部分和 第二基板被接合。 然后，对粘结的第二基板进行加工以形成诸如反射部分的膜。 可动梳状电极由可动部支撑，并且在与膜表面平行的方向上延伸。 抑制单元抑制可动梳状电极和可动部在除了垂直于膜表面的方向以外的方向上的位移。 固定梳电极由支撑部支撑并且在平行于膜表面的方向上延伸。 固定梳状电极相对于可动梳状电极交替布置，其间具有间隙。
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公开(公告)号：US20140118695A1
公开(公告)日：2014-05-01
申请号：US14065212
申请日：2013-10-28
Applicant: Canon Kabushiki Kaisha
Inventor： Yasuhiro Shimada , Masato Yajima
CPC classification number: A61B3/14 , A61B3/1015 , A61B3/102
Abstract: An ophthalmologic apparatus includes an aberration measuring unit configured to measure wavefront aberration of returning light, and a reflective optical modulation device configured to modulate the returning light. A control unit controls the reflective optical modulation device to correct the wavefront aberration of the returning light based on a measurement result of the aberration measuring unit. The reflective optical modulation device includes a reflection mirror of which the diameter of an effective region (effective diameter) that reflects the measurement light or the returning beam is 7.5 mm or less, and 61 or more actuators that act on the reflection mirror within the effective diameter. Each of the actuators includes an interdigital electrode having a maximum displacement of 7.5 μm or more.
Abstract translation: 一种眼科装置，包括：测量返回光的波前像差的像差测量单元;以及配置成调制返回光的反射型光调制装置。 控制单元基于像差测量单元的测量结果控制反射光调制装置校正返回光的波前像差。 反射光调制装置包括：反射测定光或返回光束的有效区域（有效直径）的直径为7.5mm以下的反射镜，以及作用于反射镜内的有效区域 直径。 每个致动器包括具有7.5μm或更大的最大位移的交叉指状电极。
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公开(公告)号：US20140232984A1
公开(公告)日：2014-08-21
申请号：US14180889
申请日：2014-02-14
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kenji Tamamori , Yasuhiro Shimada , Fumiaki Mizutani
CPC classification number: G02B26/0825 , A61B3/14 , G02B26/0841 , Y10T29/49002
Abstract: A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
Abstract translation: 可变形反射镜包括具有连续反射表面的反射镜基板和在多个耦合部分处连接到反射镜基板的多个致动器。 在可变形反射镜中，反射镜基板具有第一区域和比第一区域厚的第二区域，并且第一区域围绕耦合部分形成。
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公开(公告)号：US09696539B2
公开(公告)日：2017-07-04
申请号：US14180889
申请日：2014-02-14
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kenji Tamamori , Yasuhiro Shimada , Fumiaki Mizutani
CPC classification number: G02B26/0825 , A61B3/14 , G02B26/0841 , Y10T29/49002
Abstract: A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
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