公开(公告)号：US3643625A

公开(公告)日：1972-02-22

申请号：US3643625D

申请日：1969-10-07

申请人： CARL HERRMANN ASSOCIATES INC

发明人： MAHL GUNARD O B

IPC分类号： C23C14/50 ,  C23C11/02

CPC分类号： C23C14/505

摘要： A thin-film deposition apparatus having a holder and a plurality of racks. Each of the racks has a surface which has the conformation of a portion of the surface of a sphere. Means is provided for rotatably mounting the racks on the holder in such a manner that said surfaces of the racks lie generally on the surface of a common sphere. Means is provided for rotating the holder upon an axis centrally disposed with respect to the racks and for rotating the racks about their own axes of rotation with respect to the holder.

摘要翻译： 一种具有保持器和多个机架的薄膜沉积设备。 每个机架具有表面，其具有球体表面的一部分的构造。 提供了用于将支架可旋转地安装在支架上的装置，使得支架的所述表面大致位于普通球体的表面上。 提供了用于使保持器在相对于机架居中设置的轴线上旋转的装置，并且用于相对于支架围绕其自身的旋转轴线旋转机架。