专利检索 ap:("CAVENDISH KINETICS, INC.") AND inv:"Charles G. Smith" 第 1 页

1.

发明授权
DVC utilizing MEMS resistive switches and MIM capacitors 有权

公开(公告)号：US10566140B2

公开(公告)日：2020-02-18

申请号：US14904855

申请日：2014-08-01

申请人： CAVENDISH KINETICS, INC.

发明人： Richard L. Knipe , Charles G. Smith , Roberto Gaddi , Robertus Petrus Van Kampen

IPC分类号： H01G5/00 , H01G5/40 , H01H59/00 , H01G5/38 , H01G5/18 , H01G5/16 , H01L49/02

摘要： The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.