专利检索 ap:("CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE" OR "ECOLE NORMALE SUPERIEURE" OR "SORBONNE UNIVERSITE") AND inv:"Matthieu DELBECQ" 第 1 页

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发明申请
METHOD AND DEVICE FOR DEPOSITING A NANO-OBJECT 有权

公开(公告)号：US20210375621A1

公开(公告)日：2021-12-02

申请号：US17285369

申请日：2019-10-18

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , ECOLE NORMALE SUPERIEURE , SORBONNE UNIVERSITE

发明人： Matthieu DELBECQ , Tino CUBAYNES , José PALOMO , Matthieu DARTIAILH , Takis KONTOS , Matthieu DESJARDINS

IPC分类号： H01L21/02 , H01L21/66 , B82B3/00

摘要： A method for depositing an object, including:—approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10 bar.