专利检索 ap:("CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE" OR "INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN" OR "UNIVERSITE DE ROUEN NORMANDIE") AND inv:"Lorenzo RIGUTTI" 第 1 页

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发明申请
TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR 有权

公开(公告)号：US20220254601A1

公开(公告)日：2022-08-11

申请号：US17623584

申请日：2020-07-23

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN , UNIVERSITE DE ROUEN NORMANDIE

发明人： Angela VELLA , Jonathan HOUARD , Ammar HIDEUR , Laurent ARNOLDI , Lorenzo RIGUTTI

IPC分类号： H01J37/285 , H01J37/20 , H01J37/26

摘要： A tomographic atom probe includes an analysis chamber intended to analyze a sample of material in the form of a nanotip mounted on an anti-vibration support, the nanotip being brought to a temperature of between 0 kelvin and ambient temperature, the nanotip being biased at an adjustable voltage of between 1 kV and 15 kV, the analysis chamber comprising a position-sensitive and time of flight-sensitive ion detector. The atom probe comprises a generator for generating high-peak-intensity single-cycle ultrashort terahertz pulses, the analysis chamber comprising optical means for focusing the terahertz pulses, the focusing of the terahertz pulses causing the atoms of the nanotip to evaporate through the field effect without thermal effects. The terahertz pulses are generated by a femtosecond pulsed laser emitting very high-power ultrashort optical pulses at a high rate.