公开(公告)号：US10124272B2

公开(公告)日：2018-11-13

申请号：US15573080

申请日：2016-03-04

Applicant: CHUGAI RO CO., LTD.

Inventor： Junya Tanaka ,  Masamichi Yamamura ,  Kunihiro Kitahashi

IPC: B01D5/00 ,  B01D1/00 ,  C01B19/02 ,  B01D1/14 ,  B01D3/10

Abstract: A vapor circulation regeneration system is provided for utilizing a vapor by circulation and regeneration. The system includes at least: a liquefaction regeneration unit including a liquefaction space where the vapor of an object to be heated is liquefied and a heating part for maintaining a liquid-like state; a vaporization unit for heating the liquid-like material by means of a heating part so as to generate a vapor; a fluid communication part for establishing fluid communication between the liquefaction regeneration unit and the vaporization unit; a processing unit for processing an object to be processed by using the vapor; a return pipe for returning the vapor used in the processing unit to the liquefaction regeneration unit; a liquefaction regeneration temperature control part for controlling the temperature of the liquefaction regeneration unit; and a vaporization temperature control part for controlling the temperature of the vaporization unit.