公开(公告)号：US20160184873A1

公开(公告)日：2016-06-30

申请号：US14584675

申请日：2014-12-29

申请人： CLEAN FACTOMATION, INC.

发明人： Ho Geun Lee ,  Dong Gyu Yoo ,  Jae Hyun Lee ,  Jung Young Lee ,  Jun Han Lee ,  Jun Pil Yun ,  Ju Sik Jo ,  Yong Hwan Gwon ,  Sung Goo Choi

IPC分类号： B08B15/02 ,  F24F7/06 ,  H01L21/683 ,  B65G1/06

CPC分类号： B08B15/02 ,  B08B15/002 ,  B65G1/065 ,  F24F7/065 ,  H01L21/67389 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/683

摘要： Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

摘要翻译： 本发明提供一种用于在天花板上放置晶片的吸入式装置和具有该吸入式晶片放养系统的吸入型晶片放养系统，该系统包括具有固定在天花板上的搁架的放养系统，并支撑存在晶片的容器; 以及吸入组件，其安装在所述放养系统中以便对应于所述搁架并且被配置为吸入从所述容器泄漏的气体。

公开(公告)号：US09550219B2

公开(公告)日：2017-01-24

申请号：US14584675

申请日：2014-12-29

申请人： CLEAN FACTOMATION, INC.

发明人： Ho Geun Lee ,  Dong Gyu Yoo ,  Jae Hyun Lee ,  Jung Young Lee ,  Jun Han Lee ,  Jun Pil Yun ,  Ju Sik Jo ,  Yong Hwan Gwon ,  Sung Goo Choi

IPC分类号： B08B15/00 ,  B08B15/02 ,  B65G1/06 ,  F24F7/06 ,  H01L21/683 ,  H01L21/673 ,  H01L21/677

CPC分类号： B08B15/02 ,  B08B15/002 ,  B65G1/065 ,  F24F7/065 ,  H01L21/67389 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/683

摘要： Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

摘要翻译： 本发明提供一种用于在天花板上放置晶片的吸入式装置和具有该吸入式晶片放养系统的吸入型晶片放养系统，该系统包括具有固定在天花板上的搁架的放养系统，并支撑存在晶片的容器; 以及吸入组件，其安装在所述放养系统中以便对应于所述搁架并且被配置为吸入从所述容器泄漏的气体。