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1.发明申请METHOD FOR OBTAINING A WAVY LAYER LOCALLY SUSPENDED ON A SUBSTRATE USING A DEFORMATION BY FORMATION OF WRINKLES 审中-公开采用形成皱纹形成变形的位于基底上的波浪形层的方法公开(公告)号：US20160251250A1
公开(公告)日：2016-09-01
申请号：US15028876
申请日：2014-10-16
CPC分类号： B29C61/00 , B28B17/0009 , B29K2105/256 , B32B3/28 , B32B3/30 , B32B2250/02 , B32B2307/51 , B82B3/0033 , C03B23/02 , G01L1/16 , H01L21/302 , H01L21/3105 , H01L41/1132
摘要： A method forming an elastic undulated layer locally lying on a substrate from a structure including a strained elastic layer on a foundation in a solid state present at a surface of a rigid substrate, the method including: melting a foundation for a duration of at least 50 ns, the foundation thickness being at least 20 nm and lower than a predetermined thickness corresponding to a theoretical peak-to-peak amplitude of wrinkles, the melting generating a simultaneous deformation, by forming wrinkles, of the elastic layer and the foundation and accompanied by localized adherent contact between the elastic layer and the rigid substrate in zones separating regions of the foundation; solidifying the foundation to bring it back to the solid state; removing the foundation brought back to the solid state to suspend a layer above the substrate outside the zones of localized adherent contact, the suspended layer being undulated in accordance with the wrinkles.
摘要翻译： 一种在刚性基板的表面存在的固体状态的基础上由包含应变弹性层的结构局部地位于基板上的弹性波纹化层的方法，所述方法包括：将基体熔化至少50 ns，基础厚度为至少20nm且低于对应于理论峰 - 峰幅度的皱纹的预定厚度，熔融通过形成褶皱而产生弹性层和基础并伴随着 在分离基础区域的区域中弹性层和刚性基材之间的局部粘附接触; 巩固基础使其恢复到坚实的状态; 移除基底带回固体状态以将局部粘附接触区域之外的基底上方的层悬浮，悬浮层根据皱纹起伏。
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