公开(公告)号：US20120194806A1

公开(公告)日：2012-08-02

申请号：US13051874

申请日：2011-03-18

申请人： COOPER S.K. KUO ,  Ron Tsai ,  Steven Lee

发明人： COOPER S.K. KUO ,  Ron Tsai ,  Steven Lee

IPC分类号： G01N21/00

CPC分类号： G01N21/95 ,  G01N2021/9513

摘要： An apparatus for optical inspection comprises a platform extending in a first direction, a transmitting unit for transporting at least one carrier in the first direction from an input port to an output port thereof, each of the at least one carrier to support one of at least one object to be inspected, a first detector disposed above the platform and extending in a second direction orthogonal to the first direction for inspecting the at least one object on the at least one carrier, the first detector including a first scanner extending in the second direction between the input port and the output port, and a first roller set between the first scanner and the input port to apply force onto a surface of each of the at least one object.