公开(公告)号：US20240175812A1

公开(公告)日：2024-05-30

申请号：US18520807

申请日：2023-11-28

申请人： CORNING INCORPORATED

发明人： Ryan Claude Andrews ,  David Matthew Berg ,  Pierre Michel Bouzi ,  William John Furnas ,  Christopher David Gee ,  Jacob Immerman ,  Andrew Allen Lindstrand ,  Glenn Abram Newcomer ,  Evan Lewis Olson ,  Melbourne Thompson Turnbull, IV ,  Nathaniel David Wetmore

IPC分类号： G01N21/47 ,  G01N21/17 ,  G01N21/25

CPC分类号： G01N21/47 ,  G01N21/255 ,  G01N2021/1734 ,  G01N2021/1765 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/0634 ,  G01N2201/0668 ,  G01N2201/125

摘要： A scattered light polarimetry (LSP) sub-system of a hybrid system for characterizing stress in a chemically-strengthened (CS) substrate having a top-surface and a near-surface waveguide, includes a LSP light source system, an LSP light source actuator coupled to the LSP light source system, and an optical compensator within an optical path of a LSP laser beam emitted by the LSP light source system. The optical compensator includes a half-wave plate, a half-wave plate actuator, a diffuser, and a diffuser actuator. The LSP sub-system further includes a LSP detector system in optical communication with the optical compensator through an LSP coupling prism having a LSP coupling surface, a focusing lens and a focusing lens actuator, and a support plenum having a surface and a measurement aperture, the support plenum configured to support the CS substrate at a measurement plane at the measurement aperture, and to operably support the LSP coupling prism.