公开(公告)号：US20130316631A1

公开(公告)日：2013-11-28

申请号：US13955683

申请日：2013-07-31

Applicant: CORNING INCORPORATED

Inventor： Raymond Charles Cady ,  Michael John Moore ,  Mark Alex Shalkey ,  Mark Andrew Stocker

IPC: B24B37/26

CPC classification number: B24B37/26 ,  B24B13/02 ,  B24B37/20 ,  B24D18/0009 ,  Y10T29/53796 ,  Y10T156/1028 ,  Y10T156/1031

Abstract: Methods and apparatus for forming a semi-spherical polishing pad for polishing semiconductor surfaces, provide for: placing a polishing pad pre-form on a dome-shaped forming surface, the polishing pad pre-form including a circular body having a center and an outer peripheral edge, and a plurality of slots extending from the outer peripheral edge towards the center; disposing a bladder opposite to the dome-shaped forming surface and the polishing pad pre-form; inflating the bladder with a fluid such that the dome-shaped forming surface of the bonnet form presses against the polishing pad pre-form from one side and the bladder presses against the polishing pad pre-form from an opposite side; and maintaining the pressing step for a predetermined period of time to achieve the semi-spherical polishing pad.

Abstract translation: 用于形成用于抛光半导体表面的半球形抛光垫的方法和装置提供：将抛光垫预成型放置在圆顶形成形表面上，所述抛光垫预成型件包括具有中心和外部的圆形主体 周缘，以及从外周缘向中心延伸的多个槽; 设置与圆顶形状表面相对的囊和抛光垫预成型件; 用流体使气囊膨胀，使得发动机罩形状的圆顶形成表面从一侧挤压抛光垫预成型件，并且气囊从相对侧压靠抛光垫预成型件; 并且保持按压步骤达预定时间以实现半球形抛光垫。

公开(公告)号：US09004983B2

公开(公告)日：2015-04-14

申请号：US13955683

申请日：2013-07-31

Applicant: Corning Incorporated

Inventor： Raymond Charles Cady ,  Michael John Moore ,  Mark Alex Shalkey ,  Mark Andrew Stocker

IPC: B24B37/26 ,  B24B13/02 ,  B24B37/20 ,  B24D18/00

CPC classification number: B24B37/26 ,  B24B13/02 ,  B24B37/20 ,  B24D18/0009 ,  Y10T29/53796 ,  Y10T156/1028 ,  Y10T156/1031

Abstract: Methods and apparatus for forming a semi-spherical polishing pad for polishing semiconductor surfaces, provide for: placing a polishing pad pre-form on a dome-shaped forming surface, the polishing pad pre-form including a circular body having a center and an outer peripheral edge, and a plurality of slots extending from the outer peripheral edge towards the center; disposing a bladder opposite to the dome-shaped forming surface and the polishing pad pre-form; inflating the bladder with a fluid such that the dome-shaped forming surface of the bonnet form presses against the polishing pad pre-form from one side and the bladder presses against the polishing pad pre-form from an opposite side; and maintaining the pressing step for a predetermined period of time to achieve the semi-spherical polishing pad.

Abstract translation: 用于形成用于抛光半导体表面的半球形抛光垫的方法和装置提供：将抛光垫预成型放置在圆顶形成形表面上，所述抛光垫预成型件包括具有中心和外部的圆形主体 周缘，以及从外周缘向中心延伸的多个槽; 设置与圆顶形状表面相对的囊和抛光垫预成型件; 用流体使气囊膨胀，使得发动机罩形状的圆顶形成表面从一侧挤压抛光垫预成型件，并且气囊从相对侧压靠抛光垫预成型件; 并且保持按压步骤达预定时间以实现半球形抛光垫。