公开(公告)号：US11680974B2

公开(公告)日：2023-06-20

申请号：US17329172

申请日：2021-05-25

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung Lee ,  Andrew Ronaldi Tandio ,  Hung-Chan Chiang ,  Bo-Fan Tsai

IPC: G01R29/22 ,  G01R29/12 ,  H10N30/045 ,  H10N30/857 ,  H10N30/853

CPC classification number: G01R29/22 ,  G01R29/12 ,  H10N30/045 ,  H10N30/857 ,  H10N30/8554

Abstract: A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.