公开(公告)号：US20150188031A1

公开(公告)日：2015-07-02

申请号：US14578907

申请日：2014-12-22

Applicant: YOUTEC CO., LTD.

Inventor： Takeshi KIJIMA ,  Yuuji HONDA ,  Takekazu SHIGENAI ,  Hiroyuki OGIHARA

IPC: H01L41/253 ,  G01R29/22 ,  H05B3/00 ,  H01L41/187 ,  H01L41/22 ,  H01L39/24

CPC classification number: G01R29/22 ,  H01L41/257 ,  H01L41/318 ,  H05B3/0038

Abstract: A thermal poling method in which a poling treatment can be performed easily by a dry process. The poling treatment is performed on a PZT film by performing a heat treatment on the PZT film under a pressurized oxygen atmosphere at a temperature of 400° C. or more and 900° C. or less. The PZT film before the heat treatment has a single-domain crystal structure, and the PZT film after the heat treatment has a multi-domain crystal structure.

Abstract translation: 可以通过干法方便地进行极化处理的热极化方法。 通过在加压氧气氛下在400℃以上且900℃以下的温度下对PZT膜进行热处理，在PZT膜上进行极化处理。 热处理前的PZT膜具有单畴晶体结构，热处理后的PZT膜具有多畴晶体结构。

公开(公告)号：US20150054520A1

公开(公告)日：2015-02-26

申请号：US14387006

申请日：2013-03-22

Applicant: Universite De Franche Comte ,  Ecole Nationale Superieure De Mecanique Et Des Microtechniques

Inventor： Ioan Alexandru Ivan ,  Joël Agnus ,  Manitrarivo Rakotondrabe

IPC: G01R29/22 ,  H01L41/09 ,  G01B7/004

CPC classification number: G01R29/22 ,  G01B7/004 ,  H01L41/09 ,  H01L41/092 ,  H02N2/062

Abstract: A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.

Abstract translation: 用于压电致动器的微定位装置包括用于控制施加到压电致动器的电场以使压电材料变形的装置，以及用于同时测量由变形产生的在压电致动器上累积的电荷变化的装置; 以及用于获取电荷变化的测量值，用于处理这些采集和估计压电致动器的位移（x，y，z）和/或施加的力的装置。

公开(公告)号：US20130308286A1

公开(公告)日：2013-11-21

申请号：US13890548

申请日：2013-05-09

Applicant: SEIKO EPSON CORPORATION

Inventor： Kyo HORIE

IPC: H05K1/11 ,  H05K3/30 ,  H05K1/18

CPC classification number: H05K1/111 ,  G01R22/065 ,  G01R29/22 ,  G01R31/2801 ,  H01L22/32 ,  H01L24/97 ,  H01L2224/97 ,  H03H9/0542 ,  H05K1/0218 ,  H05K1/0268 ,  H05K1/113 ,  H05K1/181 ,  H05K3/0097 ,  H05K3/301 ,  H05K2201/10083 ,  H05K2201/10371 ,  Y10T29/4913 ,  H01L2224/81

Abstract: A manufacturing method according to an embodiment of the invention includes a first step of providing a sheet substrate having a piezoelectric resonator element and an integrated circuit disposed on a mounting surface of each substrate region, having implementation electrodes that are electrically connected to the integrated circuit disposed the side facing away from the mounting surface, and disposing wiring lines on the sheet substrate, the wiring liens electrically connecting the piezoelectric resonator element disposed in a first substrate region to the implementation electrode in a second substrate region in the vicinity of the piezoelectric resonator element, a second step of inputting and outputting a signal to and from the piezoelectric resonator element in the first substrate region via the implementation electrodes connected to the wiring lines, and a third step of dividing the sheet substrate along the substrate regions to cut the wiring lines.

Abstract translation: 根据本发明的实施例的制造方法包括：第一步骤，提供具有压电谐振元件的片基板和设置在每个基板区域的安装表面上的集成电路，其具有电连接到集成电路设置的实施电极 所述侧面背离所述安装面，并且将布线布置在所述片状基板上，所述布线使所述压电谐振元件附近的第二基板区域中电连接布置在第一基板区域中的所述压电谐振元件与所述实施电极 第二步骤，通过连接到布线的实施电极，将信号输入和输出到第一基板区域中的压电谐振元件的信号;以及第三步骤，沿着基板区域划分薄片基板以切断布线 。

公开(公告)号：US20110029287A1

公开(公告)日：2011-02-03

申请号：US12845401

申请日：2010-07-28

Applicant: Hoon Sohn ,  Sang Jun Lee

Inventor： Hoon Sohn ,  Sang Jun Lee

IPC: G01R27/26

CPC classification number: G01R31/2829 ,  G01R29/22 ,  G01R31/046

Abstract: A transducer system that includes a piezoelectric transducer and a self-diagnosis system electrically connected to the transducer. In one embodiment, the self-diagnosis system is configured to detect when a debonding defect has occurred in the bond between the transducer and a host structure and to detect when a crack has occurred in the transducer itself. The self-diagnosis system implements debonding-detection and crack-detection schemes that can distinguish between debonding and cracking, as well as distinguish these problems from changes arising from temperature variation.

Abstract translation: 一种传感器系统，包括电连接到换能器的压电换能器和自诊断系统。 在一个实施例中，自诊断系统被配置为检测何时在换能器和主机结构之间的接合中发生脱粘缺陷并且检测何时在换能器本身中发生裂纹。 自诊断系统实现脱粘检测和裂纹检测方案，可以区分脱粘和裂纹，并将这些问题与温度变化引起的变化区分开来。

公开(公告)号：US20100045311A1

公开(公告)日：2010-02-25

申请号：US12195140

申请日：2008-08-20

Applicant: Jaycee Howard Chung

Inventor： Jaycee Howard Chung

IPC: G01R27/08

CPC classification number: G01R29/22 ,  G01M5/0033 ,  G01M5/0041 ,  G01M5/0083

Abstract: In the two-probe case, a detector circuit to detect stress or damage in an object may include a first electrode to be positioned on the object, a second electrode to be positioned on the object, a current circuit to measure the current to the first electrode, a voltage circuit to generate a voltage for the first electrode, a controller circuit to determine and record the changing impedance between the first electrode and a second electrode. In the four-probe case, a detector circuit to detect stress or damage in an object may include a first electrode to be positioned on the object, a second electrode to be positioned on the object, a third electrode to be positioned on the object, a fourth electrode to be positioned on the object, a current source to generate current to the first electrode, a current circuit to measure the current to the second electrode, a voltage circuit to measure the voltage between the third and fourth electrodes, a controller circuit to determine and record the changing impedance between the third electrode and the fourth electrode.

Abstract translation: 在双探针情况下，用于检测物体中的应力或损伤的检测器电路可以包括要放置在物体上的第一电极，位于物体上的第二电极，用于测量到第一电极的电流的电流电路 电极，用于产生用于第一电极的电压的电压电路，控制器电路，用于确定并记录第一电极和第二电极之间的变化阻抗。 在四探针情况下，用于检测物体中的应力或损伤的检测器电路可以包括要放置在物体上的第一电极，要放置在物体上的第二电极，位于物体上的第三电极， 位于物体上的第四电极，向第一电极产生电流的电流源，测量到第二电极的电流的电流电路，测量第三和第四电极之间的电压的电压电路，控制器电路 以确定并记录第三电极和第四电极之间的变化阻抗。

公开(公告)号：US20060049833A1

公开(公告)日：2006-03-09

申请号：US10943655

申请日：2004-09-08

Applicant: Robert Moses ,  Robert Fox ,  Richard Chattin ,  Qamar Shams ,  Christopher Fox ,  Melanie Fox

Inventor： Robert Moses ,  Robert Fox ,  Richard Chattin ,  Qamar Shams ,  Christopher Fox ,  Melanie Fox

IPC: G01N27/00

CPC classification number: G01R29/22 ,  G01H13/00

Abstract: A system and method are provided for monitoring performance capacity of a piezoelectric material that may form part of an actuator or sensor device. A switch is used to selectively electrically couple an inductor to the piezoelectric material to form an inductor-capacitor circuit. Resonance is induced in the inductor-capacitor circuit when the switch is operated to create the circuit. The resonance of the inductor-capacitor circuit is monitored with the frequency of the resonance being indicative of performance capacity of the device's piezoelectric material.

Abstract translation: 提供了一种系统和方法，用于监测可形成致动器或传感器装置的一部分的压电材料的性能。 开关用于选择性地将电感器电耦合到压电材料以形成电感器 - 电容器电路。 当开关操作以产生电路时，在电感 - 电容电路中感应谐振。 监测电感 - 电容电路的谐振，谐振频率表示器件的压电材料的性能。

公开(公告)号：US06880213B1

公开(公告)日：2005-04-19

申请号：US09421434

申请日：1999-10-19

Applicant: Takaaki Asada

Inventor： Takaaki Asada

IPC: G01R29/22 ,  G01R31/28 ,  H01L41/107 ,  H04R17/00

CPC classification number: H01L41/107 ,  G01R29/22 ,  G01R31/2829 ,  G09G3/3406 ,  H01L41/273 ,  Y10T29/42 ,  Y10T29/49004 ,  Y10T29/49005

Abstract: A method for quickly screening piezoelectric transformer apparatuses having low mechanical strength and latent defects is performed by connecting a load impedance to a generator of a piezoelectric transformer apparatus and applying a stress signal to an actuator to vibrate the piezoelectric transformer apparatus. Latent-defect transformer apparatuses having low mechanical strength are damaged during this process and therefore can be easily identified.

Abstract translation: 通过将负载阻抗连接到压电变压器装置的发电机并且向致动器施加应力信号以振动压电变压器装置来执行用于快速筛选具有低机械强度和潜在缺陷的压电变压器装置的方法。 在该过程中机械强度低的潜在缺陷变压器装置损坏，因此可以容易地识别。

公开(公告)号：US06593681B2

公开(公告)日：2003-07-15

申请号：US10020474

申请日：2001-12-12

Applicant: Mitsuo Ebisawa ,  Takeshi Nagai ,  Narutoshi Kanazawa ,  Masahiko Ito ,  Yuko Fujii ,  Tooru Sugimori

Inventor： Mitsuo Ebisawa ,  Takeshi Nagai ,  Narutoshi Kanazawa ,  Masahiko Ito ,  Yuko Fujii ,  Tooru Sugimori

IPC: H01L41087

CPC classification number: H01L41/45 ,  G01R29/22 ,  H01L41/087 ,  H01L41/257

Abstract: A polarization apparatus is provided wherein a piezoelectric body tube 3 is wound around a first rotation drum 5 and a second rotation drum 6 and a coaxial flexible piezoelectric body 2 is polarized while the piezoelectric body tube 3 is wound. According to the polarization apparatus, polarization can be conducted except for the coaxial flexible piezoelectric body 2 of the portion containing a defect and a defect existing in the piezoelectric body tube 3 of a given length can also be detected before an outer electrode 4 is formed.

公开(公告)号：US06556028B1

公开(公告)日：2003-04-29

申请号：US09850049

申请日：2001-05-07

Applicant: Yuriy Umanskiy ,  Arnold Shpilberg ,  Vladimir Vaninskiy ,  Eugene Dvoskin

Inventor： Yuriy Umanskiy ,  Arnold Shpilberg ,  Vladimir Vaninskiy ,  Eugene Dvoskin

IPC: G01R2922

CPC classification number: G01R29/22

Abstract: Roughly described, piezoelectric actuators are tested as part of an assembly using a three-stage process. In the first stage, a substantially steady state electromechanical potential is induced into a piezoelectric member of an assembly. Typically this can be accomplished by applying a DC voltage across the crystal for long enough period of time for it to achieve a substantially steady state mechanical distortion. In the second stage, the electromechanical potential of the piezoelectric actuator is discharged rapidly but incompletely. The third stage begins with the abrupt termination of the rapid-discharge stage, thereby causing the crystal, and the voltage produced across it, to oscillate and decay freely. The voltage across the crystal continues to decay slowly in the third stage, and the oscillations continue to decay in magnitude as well, providing a relatively complex signal from which features can be extracted and compared to those of known-good devices.

Abstract translation: 粗略地描述，压电致动器被测试为使用三阶段工艺的组件的一部分。 在第一阶段中，基本上稳定的机电电位被引入到组件的压电元件中。 通常这可以通过在晶体上施加直流电压足够长的时间来实现，以实现基本稳定的机械失真。 在第二阶段，压电致动器的机电电位迅速而不完全地释放。 第三阶段开始于快速放电阶段的突然终止，从而导致晶体和其周围产生的电压自由振荡和衰减。 晶体上的电压在第三级继续缓慢衰减，并且振荡也在大小上继续衰减，提供相对复杂的信号，从中可以提取特征并与已知的器件进行比较。

公开(公告)号：US06348795B2

公开(公告)日：2002-02-19

申请号：US09904403

申请日：2001-07-12

Applicant: Ralph Pringle, Jr. ,  Felix E. Morgan

Inventor： Ralph Pringle, Jr. ,  Felix E. Morgan

IPC: G01V300

CPC classification number: G01R31/2824 ,  G01R29/22

Abstract: A method for determining a resonant frequency of a mechanical device having a first mass and at least one second mass mechanically coupled to the first mass comprises the steps of: providing a control signal to a voltage-controlled oscillator (VCO) to control the frequency of an output thereof; translating a phase shifted output of the VCO into an oscillatory force which is applied to one of the first and second masses to cause the mechanical device to respond; measuring the response of the mechanical device and generating a response signal representative thereof in frequency and amplitude; generating an error signal proportional to the phase difference between a signal representative of the output of the VCO and the measured response signal; adjusting the control signal to cause the oscillatory force applied to the one mass to sweep within a calculated frequency range rendering the amplitude of the response signal to approach and exceed a calculated threshold value; and when the calculated threshold is exceeded by the amplitude of the response signal, finely adjusting the control signal to the VCO until the value of the measured error signal is equal substantially to a calculated final error value, whereupon the frequency of the response signal is the resonant frequency of the mechanical device.

Abstract translation: 一种用于确定具有第一质量的机械装置和机械耦合到第一质量的至少一个第二质量的机械装置的谐振频率的方法包括以下步骤：向压控振荡器（VCO）提供控制信号以控制 其输出; 将VCO的相移输出转换成施加到第一和第二质量中的一个的振荡力，以使机械装置响应; 测量机械装置的响应并产生其频率和幅度的响应信号; 产生与表示VCO的输出的信号与所测量的响应信号之间的相位差成比例的误差信号; 调整所述控制信号以使施加到所述一个质量块的振荡力在计算的频率范围内扫描，使得所述响应信号的幅度接近并超过所计算的阈值; 并且当所计算的阈值超过响应信号的幅度时，将控制信号精细地调整到VCO直到所测量的误差信号的值基本上等于所计算的最终误差值，于是响应信号的频率为 谐振频率的机械装置。