公开(公告)号：US20160258816A1

公开(公告)日：2016-09-08

申请号：US14849567

申请日：2015-09-09

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Yi-Ming HSU ,  Li-Min WANG ,  Yu-Chun HUANG ,  Yen-Cheng CHEN

IPC: G01J3/443 ,  G01J1/42

CPC classification number: G01J3/443 ,  G01J3/28 ,  G01J3/2803

Abstract: An optical method for monitoring plasma discharging glow is described, which includes the following steps. Plasma discharging glow is detected to obtain various optical signals using a detector. The optical signals are captured and converted into various electric signals by using a sensing circuit. A calculation step is performed according to the electric signals to obtain various light intensities corresponding to various locations in the plasma discharging glow using an arithmetic unit. An image of the plasma discharging glow is reconstructed according to the locations in the plasma discharging glow and the corresponding light intensities using an image reconstruction unit.

Abstract translation: 描述了用于监测等离子体放电辉光的光学方法，其包括以下步骤。 检测等离子体放电辉光以使用检测器获得各种光信号。 通过使用感测电路将光信号捕获并转换成各种电信号。 根据电信号执行计算步骤，以使用运算单元来获得对应于等离子体放电辉光中的各种位置的各种光强度。 根据等离子体放电辉光中的位置和使用图像重建单元的对应光强度重建等离子体放电辉光的图像。