公开(公告)号：US20220139729A1

公开(公告)日：2022-05-05

申请号：US17576111

申请日：2022-01-14

Applicant: Canon Anelva Corporation

Inventor： Jun MIURA ,  Naoya FUKUDA ,  Shuji KUMAGAI ,  Shinji TAKAGI ,  Tetsuro TODA ,  Hidetoshi SHIMOKAWA ,  Satoshi NEGISHI ,  Satoshi NOMURA ,  Junya SOEDA

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.