公开(公告)号：US20240003674A1

公开(公告)日：2024-01-04

申请号：US18216552

申请日：2023-06-29

申请人： Carl Zeiss Industrielle Messtechnik GmbH

发明人： Aksel Göhnermeier

IPC分类号： G01B11/00 ,  G02B26/08 ,  G02B13/22 ,  H04N23/56 ,  H04N23/12

CPC分类号： G01B11/005 ,  G02B26/0833 ,  G02B13/22 ,  H04N23/56 ,  H04N23/12

摘要： A photogrammetric camera for the two-dimensional measurement of objects has a lens, an image sensor and a pupil filter configured as a micromirror, each of which is transferable into a first and second tilted position. An illumination system produces light. A micromirror in the first tilt position reflects light produced by the illumination system such that the light cannot reach the object while light reflected at the object is guided to the image sensor. Conversely, a micromirror in the second tilt position reflects light such that the light can reach the object while light reflected at the object is supplied to the image sensor. To implement a recording of an image with coaxial dark or coaxial reflected light illumination, the micromirror device is controlled such that the light produced by the illumination system is incident on the surface at different angles within an angular range of at least arcsin(NA).