公开(公告)号：US20220193819A1

公开(公告)日：2022-06-23

申请号：US17556070

申请日：2021-12-20

申请人： Carl Zeiss Microscopy GmbH

发明人： Stephan Hiller

IPC分类号： B23K26/04 ,  H01J37/22 ,  H01J37/20 ,  B23K26/03 ,  B23K26/082 ,  B23K26/362 ,  B23K26/08 ,  H01L21/67 ,  H01L21/268 ,  H01L23/544

摘要： A material processing system includes a particle beam column for directing a particle beam at a first processing region and a laser scanner for directing a laser beam at a second processing region. A method for operating the material processing system includes: scanning a first mark placed on an object with the particle beam; scanning the first mark with the laser beam for a first time and producing a second mark on the object with the laser beam; scanning the second mark with the particle beam; and scanning the first mark with the laser beam for a second time and removing material of the object with the laser beam based on the scanning of the second mark with the particle beam.

公开(公告)号：US20210271063A1

公开(公告)日：2021-09-02

申请号：US17083742

申请日：2020-10-29

申请人： Carl Zeiss Microscopy GmbH

发明人： Andreas Schmaunz ,  Gero Walter ,  Stephan Hiller

IPC分类号： G02B21/26 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244 ,  G02B21/08 ,  G02B21/28 ,  G02B21/30

摘要： The invention relates to a method for operating a particle beam apparatus and/or a light microscope, to a computer program product and to a particle beam apparatus and a light microscope, by means of which this method is able to be carried out. The method includes a change in a first temperature of an object, wherein the object is arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object alters a second temperature of the object receiving device from a first temperature value to a second temperature value. Further, the method includes changing the supply current of the motor from a first current value to a second current value, wherein the supply current is designed to hold the object receiving device in position, and changing a temperature of the object receiving device from the second temperature value to a third temperature value on account of heat generated by the motor, which is obtained by the second current value of the supply current and fed to the object receiving device. TOT1−15° C.≤TOT3≤TOT1+15° C. applies, where TOT1 is the first temperature value of the object receiving device and where TOT3 is the third temperature value of the object receiving device.

公开(公告)号：US11347043B2

公开(公告)日：2022-05-31

申请号：US17083742

申请日：2020-10-29

申请人： Carl Zeiss Microscopy GmbH

发明人： Andreas Schmaunz ,  Gero Walter ,  Stephan Hiller

IPC分类号： G02B21/26 ,  G02B21/08 ,  G02B21/28 ,  G02B21/30 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

摘要： A particle beam apparatus and/or a light microscope is operated. A first temperature of an object may be changed, where the object may be arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object may alter a second temperature of the object-receiving device from a first temperature value to a second temperature value. The supply current of the motor may be changed from a first current value to a second current value, where the supply current is designed to hold the object-receiving device in position, and a temperature of the object-receiving device may be changed from the second temperature value to a third temperature value on account of heat generated by the motor, which may be obtained by the second current value of the supply current and fed to the object receiving device.

公开(公告)号：US20210241992A1

公开(公告)日：2021-08-05

申请号：US17160679

申请日：2021-01-28

申请人： Carl Zeiss Microscopy GmbH

发明人： Andreas Schertel ,  Andreas Schmaunz ,  Endre Majorovits ,  Bernd Stenke ,  Stephan Hiller ,  Matthias Karl

IPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/145 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28

摘要： An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.