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公开(公告)号：US20240094637A1
公开(公告)日：2024-03-21
申请号：US18516648
申请日：2023-11-21
申请人： Carl Zeiss SMT GmbH
CPC分类号： G03F7/702 , G02B5/0891 , G02B17/0663
摘要： An imaging optical unit comprises a plurality of mirrors for imaging an object field in an object plane into an image field in an image plane. An image-side numerical aperture is greater than 0.55. A ratio between an object/image offset and a meridional transverse direction is at least 0.5. A ratio between a working distance between the object plane and a reflection portion, closest to the object plane, of one of the mirrors and the meridional transverse dimension is at least 0.05. The working distance is at least 270 mm. This can yield an imaging optical unit, the use of which is relatively manageable in a projection exposure apparatus, such as for EUV projection lithography.
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公开(公告)号：US20240103382A1
公开(公告)日：2024-03-28
申请号：US18523198
申请日：2023-11-29
申请人： Carl Zeiss SMT GmbH
CPC分类号： G03F7/70591 , G02B17/0663 , G02B27/4222 , G03F7/70158 , G03F7/702 , G03F7/70233
摘要： An imaging optical unit comprises a plurality of minors for imaging an object field into an image field. The imaging optical unit has an image-side numerical aperture greater than 0.55. Each mirror is configured so that it can be measured by a testing optical unit having at least one DOE with a predetermined maximum diameter for test wavefront generation. For the complete measurement of all reflection surfaces of the minors, a maximum number of DOEs of the testing optical unit and/or a maximum number of DOE test positions of the at least one DOE of the testing optical unit comes into play, which is no more than five times the number of minors in the imaging optical unit. The result is an imaging optical unit in which a testing-optical measurement remains manageable even in the case of a design with an image-side numerical aperture which is relatively large.
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