公开(公告)号：US06718110B2

公开(公告)日：2004-04-06

申请号：US09878414

申请日：2001-06-12

申请人： Carlo Carmannini ,  Steffen Schmid

发明人： Carlo Carmannini ,  Steffen Schmid

IPC分类号： G02B610

CPC分类号： G02B6/1342 ,  G02B2006/12176 ,  G02F1/125

摘要： The invention relates to a method of manufacturing an indiffused optical waveguide (6) in a substrate (1). A metal layer (7) and photoresist (8) are deposited on a substrate (1) in this order. Portions of the photoresist (8) are removed such that a photoresist structure (8) corresponding to the desired waveguide structure is left. The exposed portions of the metal layer (7) are removed by a chemical/physical etching technique whereafter the remaining photoresist (8) is removed and the remaining metal layer (7) is diffused into the substrate (1) by a heat treatment. The usage of a chemical/physical etching method for removing portions of the metal layer (7) results in smaller variations in the width of the waveguide after indiffusion. Such waveguides are particularly advantageous when being used in connection with acousto-optical devices. The optical waveguides according to the invention are also useable with other integrated optics devices.

摘要翻译： 本发明涉及一种制造衬底（1）中的扩散光波导（6）的方法。 依次将金属层（7）和光致抗蚀剂（8）沉积在基板（1）上。 去除光致抗蚀剂（8）的部分，使得留下对应于期望的波导结构的光致抗蚀剂结构（8）。 通过化学/物理蚀刻技术去除金属层（7）的暴露部分，然后除去剩余的光致抗蚀剂（8），并通过热处理将剩余的金属层（7）扩散到基板（1）中。 使用用于去除金属层（7）的部分的化学/物理蚀刻方法导致在扩散之后波导宽度的变化较小。 当与声光器件结合使用时，这种波导是特别有利的。 根据本发明的光波导也可以与其它集成光学器件一起使用。